“…Among various magnetic thin film materials, NiFe alloys of a range of chemical compositions, from Ni-rich permalloy to Fe-rich invar, are of great interest. They are being utilized in recording devices, memory devices for computer, microelectromechanical systems (MEMS), and magnetic sensor applications [1,[3][4][5][6], where low coercivity (H C ), high saturation magnetization (M S ), high permeability (µ r ), and a high magnetoimpedance (MI) ratio with good MI sensitivity are often required [7]. In general, NiFe alloys exhibit soft magnetic properties [8], decent MI response [9,10], and excellent corrosion resistance [11].…”