2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) 2012
DOI: 10.1109/iscdg.2012.6360041
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Magnetoresistance mobility extraction in the saturation regime of short channel MOS devices

Abstract: The effect of magnetic field in the saturation regime of sub �m MOSFETs is being reported here for the first time. The study was based on bulk MOSFETs featuring a high-Klmetal gate with an equivalent oxide thickness of 2.4 nm. Channel length ranged from 1 �m down to 50 nm, while width was kept constant at 10 �m. It is found that it is possible to extract a magnetoresis tance mobility �MR even in the saturation regime of operation and in turn study the observed �MR against channel length, tem perature, drain vo… Show more

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Cited by 4 publications
(4 citation statements)
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“…V th was extracted from the Y-function method(8). V th shift as a function of WNW may be caused by backside/sidewall D it .…”
mentioning
confidence: 99%
“…V th was extracted from the Y-function method(8). V th shift as a function of WNW may be caused by backside/sidewall D it .…”
mentioning
confidence: 99%
“…this feature means that an apparent MR mobility can be directly extracted from linear regime to saturation without any assumption on dimensions [8].…”
Section: Resultsmentioning
confidence: 99%
“…It allows an accurate mobility extraction without any need for precise information on the exact physical dimensions and surface carrier density of the devices. A first attempt has already been performed in bulk technology [8], but with no drain current modeling aspects and no consideration of carrier saturation velocity effect. In this paper, we developed a new calibrated physical compact model of drain current, which includes magnetotransport phenomenon, and allows physical interpretation of MR mobility and subsequent extraction of carrier saturation velocity.…”
mentioning
confidence: 99%
“…It is clear, that the device in saturation strongly deviates from the rather homogenous and well-defined system in the linear operation regime. The question arises of how to interpret the measured MR mobility in this high-field regime [14]. Here, we outline a descriptive picture, which helps to get a better understanding.…”
Section: E High Field Regimementioning
confidence: 99%