1993
DOI: 10.1109/20.280885
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Magnetostriction in FeTaN thin films

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Cited by 14 publications
(2 citation statements)
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“…And the stress changes, taking a minimum value at N2 partial pressure of 10 %. These results are due to the a-Fe lattice spacing expansion caused by the nitrogen atoms intrusion [3], and the lattice spacing of the film at N2 partial pressure of 10 % is almost equal to that of bulk Fe.…”
Section: Anisotropymentioning
confidence: 91%
See 1 more Smart Citation
“…And the stress changes, taking a minimum value at N2 partial pressure of 10 %. These results are due to the a-Fe lattice spacing expansion caused by the nitrogen atoms intrusion [3], and the lattice spacing of the film at N2 partial pressure of 10 % is almost equal to that of bulk Fe.…”
Section: Anisotropymentioning
confidence: 91%
“…After the background pressure was lower than 4XI0-7 Torr, argon and nitrogen mixed gas was introduced as reactive sputtering gas for Fe-Si-N film preparation. The typical total gas pressure was set at 8XI0- 3 Torr as the internal stress and the coercivity became small.…”
Section: Film Preparationmentioning
confidence: 99%