Magnetron Sputtering Source Design and Operation

Bishop, Charles A.

doi:10.1016/b978-0-323-29644-1.00020-7

Cited by 3 publications

(2 citation statements)

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In our optical simulations, the refractive index n of the spacer layer is varied over a broad range from n = 1.25 to n = 2.5, since simulation gives us the freedom to choose any arbitrary value for n. In order to address the real working device, as examples, the optical data from common optical spacer materials, like Silicon Nitride (SiN; n (SiN) = 2.0458), Magnesium Floride (MgF 2 ; n (MgF 2 ) = 1.3777), and polymethylmetacrylate (PMMA; n (PMMA) = 1.4906) are used as well in the simulations. In general, optical mediums, such as SiN and MgF 2 , can be coated by sputtering [47,48], thermal evaporation [49,50,51], and atomic layer deposition (ALD) [52] while polymer-based spacers such as Polymethylmethacrylate (PMAA) can be coated by solutions using different methods, such as spin, blade, slot die, and spray coating [53]. The spacer thickness is varied from 0 nm up to 320 nm, in steps of 40 nm.…”

Section: Resultsmentioning

confidence: 99%

Light Management Enhancement for Four-Terminal Perovskite-Silicon Tandem Solar Cells: The Impact of the Optical Properties and Thickness of the Spacer Layer between Sub-Cells

et al. 2018

View full text Add to dashboard Cite

Mechanical stacking of a thin film perovskite-based solar cell on top of crystalline Si (cSi) solar cell has recently attracted a lot of attention as it is considered a viable route to overcome the limitations of cSi single junction power conversion efficiency. Effective light management is however crucial to minimize reflection or parasitic absorption losses in either the top cell or in the light in-coupling of the transmitted light to the bottom sub-cell. The study here is focused on calculating an optimum performance of a four-terminal mechanically stacked tandem structure by varying the optical property and thickness of the spacer between top and bottom sub-cells. The impact of the nature of the spacer material, with its refractive index and absorption coefficient, as well as the thickness of that layer is used as variables in the optical simulation. The optical simulation is done by using the transfer matrix-method (TMM) on a stack of a semi-transparent perovskite solar cell (top cell) mounted on top of a cSi interdigitated back contact (IBC) solar cell (bottom cell). Two types of perovskite absorber material are considered, with very similar optical properties. The total internal and external short circuit current (Jsc) losses for the semitransparent perovskite top cell as a function of the different optical spacers (material and thickness) are calculated. While selecting the optical spacer materials, Jsc for both silicon (bottom cell) and perovskite (top cell) were considered with the aim to optimize the stack for maximum overall short circuit current. From these simulations, it was found that this optimum in our four-terminal tandem occurred at a thickness of the optical spacer of 160 nm for a material with refractive index n = 1.25. At this optimum, with a combination of selected semi-transparent perovskite top cell, the simulated maximum overall short circuit current (Jsc-combined, max) equals to 34.31 mA/cm2. As a result, the four-terminal perovskite/cSi multi-junction solar cell exhibits a power conversion efficiency (PCE) of 25.26%, as the sum of the perovskite top cell PCE = 16.50% and the bottom IBC cSi cell PCE = 8.75%. This accounts for an improvement of more than 2% absolute when compared to the stand-alone IBC cSi solar cell with 23.2% efficiency.

show abstract

Section: Resultsmentioning

confidence: 99%

Light Management Enhancement for Four-Terminal Perovskite-Silicon Tandem Solar Cells: The Impact of the Optical Properties and Thickness of the Spacer Layer between Sub-Cells

et al. 2018

View full text Add to dashboard Cite

show abstract

“…Larger discharge currents and increased sputter deposition rates are achieved with magnetron sputtering rather than traditional sputtering technologies [241][242][243] (usually 1 µm/min is attained in RF magnetron sputtering, against the usual 0.5 µm/min of conventional RF sputtering, both considering aluminum as target material [254]). Magnetron sputtering can be applied both in direct current and radio frequency modality, but usually it is applied in RF modality because of the higher deposition rates; it can be used to deposit thin films with thickness from tens of nanometers to tens of micrometers [254,260]. The magnetron sputtering process is shown in Figure 28.…”

Section: Magnetron Sputteringmentioning

confidence: 99%

Thermoelectric Materials and Applications: A Review

d’Angelo,

Galassi,

Lecis

2023

Energies

View full text Add to dashboard Cite

Solid-state energy conversion has been established as one of the most promising solutions to address the issues related to conventional energy generation. Thermoelectric materials allow direct energy conversion without moving parts and being deprived of greenhouse gases emission, employing lightweight and quiet devices. Current applications, main thermoelectric material classes, and manufacturing methods are the topics of this work; the discussion revolves around the crucial need for highly performing materials in the mid-temperature range, and around the development of more scalable fabrication technologies. The different manufacturing methods for thermoelectric bulk materials and films are also discussed. Small-scale technologies are generating increasing interest in research; the high potential of aerosol jet printing is highlighted, stressing the many advantages of this technology. A promising approach to scale the production of miniaturized thermoelectric devices that combines high energy ball milling and aerosol jet printing is proposed in the conclusion.

show abstract