Manufacturing implications of ultrahigh speed packaging and interconnect design

Beckenbaugh, W.M.

doi:10.1109/eemts.1988.75967

Cited by 2 publications

(1 citation statement)

References 7 publications

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“…The need for high speed and high precision positioning systems is increasing in many fields of technology, such as microelectronics [1], micromechanics and microelectromechanical systems. For mass production, the assembling/mounting tools have to achieve high precision and have to work with high speed or/and highly parallel.…”

Section: Introductionmentioning

confidence: 99%

<title>Novel high-speed 3-DOF linear direct drive operating with submicron precision</title>

Sprenger¹,

Siegwart

1998

SPIE Proceedings

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Developments in microelectronics, micromechanics and microelectromechanical systems (e.g. micromotors, microsensors) require significant improvements in manufacturing tools for mass productions. Especially the assembling tools have to become faster and more precise. Many assembly devices use XY stages driven by DC servomotors with ball screws or parallel structures; others use linear drives with traditional ball bearings. Only a few devices use linear drives together with air bearings, but always together with an angular guide for X and Y direction. The novel approach presented in this paper is based on linear drives together with a planar air bearing. In contrast to other stages, it doesn't need any angular guide. This reduces the moved mass and leads to higher accelerations. It consists of an arrangement of four identical moving-coils attached to a slide, which is suspended by a planar air bearing. This new configuration allows a workspace of 60 x 60 mm 2 and an acceleration exceeding 10 g 1 with a resolution better than 100 nm. This paper gives an overview of the system, describes the design of the moving-coils and shows first experimental results of the controller.

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Section: Introductionmentioning

confidence: 99%