Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm

Barba, Paolo Di; Mognaschi, Maria Evelina; Sieni, Elisabetta

doi:10.3390/math8091509

Cited by 8 publications

(6 citation statements)

References 54 publications

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“…Since the aforementioned analytical solutions are unobtainable, suitable numerical procedures have to be selected, and it becomes imperative to evidence the pros and cons of each method [ 25 , 26 , 30 , 31 , 32 ]. MEMS is a rampant technology employed for realizing thermo-elastic systems [ 1 , 33 , 34 , 35 , 36 , 37 ], and it has a wide variety of applications ranging from biomedical engineering to microfluidics [ 38 , 39 , 40 , 41 , 42 ]. Moreover, many researchers are actively engaged in the development of important experimental research works for the development and prototyping of special MEMS such as, for example, circular graphene membrane MEMS devices [ 43 , 44 ], SiN circular membrane MEMS devices [ 45 , 46 ], and CMOS MEMS-based membrane-bridge devices [ 47 ] particularly useful for industrial applications.…”

Section: Introductionmentioning

confidence: 99%

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

Versaci

Jannelli

Morabito

et al. 2021

Sensors

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In this study, an accurate analytic semi-linear elliptic differential model for a circular membrane MEMS device, which considers the effect of the fringing field on the membrane curvature recovering, is presented. A novel algebraic condition, related to the membrane electromechanical properties, able to govern the uniqueness of the solution, is also demonstrated. Numerical results for the membrane profile, obtained by using the Shooting techniques, the Keller–Box scheme, and the III/IV Stage Lobatto IIIa formulas, have been carried out, and their performances have been compared. The convergence conditions, and the possible presence of ghost solutions, have been evaluated and discussed. Finally, a practical criterion for choosing the membrane material as a function of the MEMS specific application is presented.

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Section: Introductionmentioning

confidence: 99%

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

Versaci

Jannelli

Morabito

et al. 2021

Sensors

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“…Thus arises the need to design sensors and actuators to meet the multiple requirements of the most widespread industrial, civil and biomedical applications [ 1 , 2 , 3 ]. In this context, static and dynamic Micro-Electro-Mechanical-Systems (MEMS) technology has matured, especially in domains where miniaturized and integrated electromechanical systems are required [ 4 , 5 , 6 ]. Moreover, MEMS represent one of the most important achievements of engineering on an industrial scale [ 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

“…In this context, static and dynamic Micro-Electro-Mechanical-Systems (MEMS) technology has matured, especially in domains where miniaturized and integrated electromechanical systems are required [ 4 , 5 , 6 ]. Moreover, MEMS represent one of the most important achievements of engineering on an industrial scale [ 5 , 6 ]. Currently, the industrial applications of MEMS devices are extremely varied, from applications in the biomedical domain [ 2 , 3 , 7 ] and thermally driven systems [ 8 , 9 ] to elastic structures [ 1 , 10 ] gaining wide acclaim, owing to both coupled thermal-elastic systems [ 5 , 8 , 9 ] and electrostatic-elastic systems [ 4 , 5 , 11 ] for industrial applications.…”

Section: Introductionmentioning

confidence: 99%

Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review

2020

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The evolution of engineering applications is increasingly shifting towards the embedded nature, resulting in low-cost solutions, micro/nano dimensional and actuators being exploited as fundamental components to connect the physical nature of information with the abstract one, which is represented in the logical form in a machine. In this context, the scientific community has gained interest in modeling membrane Micro-Electro-Mechanical-Systems (MEMS), leading to a wide diffusion on an industrial level owing to their ease of modeling and realization. Physically, once the external voltage is applied, an electrostatic field, orthogonal to the tangent line of the membrane, is established inside the device, producing an electrostatic pressure that acts on the membrane, deforming it. Evidently, the greater the amplitude of the electrostatic field is, the greater the curvature of the membrane. Thus, it seems natural to consider the amplitude of the electrostatic field proportional to the curvature of the membrane. Starting with this principle, the authors are actively involved in developing a second-order semi-linear elliptic model in 1D and 2D geometries, obtaining important results regarding the existence, uniqueness and stability of solutions as well as evaluating the particular operating conditions of use of membrane MEMS devices. In this context, the idea of providing a survey matures to discussing the similarities and differences between the analytical and numerical results in detail, thereby supporting the choice of certain membrane MEMS devices according to the industrial application. Finally, some original results about the stability of the membrane in 2D geometry are presented and discussed.

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“…Therein, the goal is to find so-called Pareto optimal solutions, which cannot be further improved with respect to one objective without worsening another [24]. Such MOO problems are faced and tackled increasingly more often in various engineering applications that concern geometry optimization [25][26][27][28]. To address these problems, traditional GAs have been extended, e.g., in the form of so-called nondominated sorting genetic algorithms (NSGAs) [29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Quadrupole magnet design based on genetic multi-objective optimization

Diehl,

Tresckow,

Scholtissek

et al. 2023

Electr Eng

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This work suggests to optimize the geometry of a quadrupole magnet by means of a genetic algorithm adapted to solve multi-objective optimization problems. To that end, a non-domination sorting genetic algorithm known as NSGA-III is used. The optimization objectives are chosen such that a high magnetic field quality in the aperture of the magnet is guaranteed, while simultaneously the magnet design remains cost-efficient. The field quality is computed using a magnetostatic finite element model of the quadrupole, the results of which are post-processed and integrated into the optimization algorithm. An extensive analysis of the optimization results is performed, including Pareto front movements and identification of best designs.

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Many Objective Optimization of a Magnetic Micro–Electro–Mechanical (MEMS) Micromirror with Bounded MP-NSGA Algorithm

Cited by 8 publications

References 54 publications

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

Curvature-Dependent Electrostatic Field as a Principle for Modelling Membrane-Based MEMS Devices. A Review

Quadrupole magnet design based on genetic multi-objective optimization

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