2015
DOI: 10.1063/1.4913263
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Markedly distinct growth characteristics of semipolar (112¯2) and (1¯1¯22¯) InGaN epitaxial layers

Abstract: We compare metalorganic vapor phase epitaxy of InGaN/GaN heterostructures on semipolar (112¯2) and (1¯1¯22¯) GaN bulk substrates. In incorporation efficiency is higher for (112¯2) InGaN, which enables higher temperature growth of InGaN and is beneficial for quality improvement. InGaN/GaN quantum wells (QWs) on (112¯2) show abrupt interfaces, but those on (1¯1¯22¯) tend to form three-dimensional nanofacets. Differences in growth temperature and structures of the (112¯2) and (1¯1¯22¯) QWs cause higher internal q… Show more

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Cited by 7 publications
(8 citation statements)
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“…On (0001) these IQE ranges seem realistic for a single QW close to a GaN:Mg layer, and the values for (1122) are close to reported PL IQEs. 54,55 Therefore, the lower light output at low currents of the semi-polar LEDs is due to some fundamental processes and not due to light extraction issues. This is consistent with findings in the literature.…”
Section: Doping and Contactsmentioning
confidence: 99%
“…On (0001) these IQE ranges seem realistic for a single QW close to a GaN:Mg layer, and the values for (1122) are close to reported PL IQEs. 54,55 Therefore, the lower light output at low currents of the semi-polar LEDs is due to some fundamental processes and not due to light extraction issues. This is consistent with findings in the literature.…”
Section: Doping and Contactsmentioning
confidence: 99%
“…The emission wavelength of the ð11 22Þ planar QW is longer than that of the ð 1 12 2Þ planar QW (480 nm versus 425 nm), which can be attributed to a higher In incorporation efficiency of the ð11 22Þ plane. 21) Figure 2(a) shows that the emission peak from the 3D QWs on ð11…”
mentioning
confidence: 99%
“…One of the plausible factors is the crystallographic orientation dependence of the In incorporation efficiency. Actually, multiple papers have already reported such dependencies, 21,[26][27][28][29] but there is no direct comparison among (0001), AEð11…”
mentioning
confidence: 99%
“…MQWs grown on low‐defect (112¯2) heteroepitaxial GaN templates were investigated and an IQE of 23% in the green region was achieved, comparable to the one obtained from bulk semipolar substrates . The emission wavelength was tuned from 450 to 550 nm by simply increasing the TMGa flow rate in the wells.…”
Section: Discussionmentioning
confidence: 90%
“…Nishinaka et al have recently reported IQE values, obtained by measuring the I RT / I 13 K ratio, of 47% at 460 nm and 16% at 530 nm in (112¯2) QWs grown on low‐defect bulk substrates. The comparison between their IQE values on bulk substrates and ours further confirms the quality of our semipolar GaN templates, and that of the QWs grown thereon, thus indicating that the current growth conditions are better optimized for the green wavelength range than for the blue one.…”
Section: Resultsmentioning
confidence: 99%