2005
DOI: 10.1007/s00339-005-3418-7
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Maskless nonlinear lithography with femtosecond laser pulses

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Cited by 60 publications
(28 citation statements)
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“…Laser processing experiments described in this work have been carried out at the Laser Zentrum Hannover (LZH) using a commercial Ti:Sapphire oscillator-amplifier system (Femtopower compact Pro, Femtolasers Produktions GmbH) at ambient conditions. A detailed description of the experimental setup is given in the literature (Koch et al, 2006). The laser system provides Gaussian laser pulses with a wavelength and a pulse length of λ = 800 nm and τ < 30 fs, respectively.…”
Section: Nonlinear Femtosecond Laser Processingmentioning
confidence: 99%
“…Laser processing experiments described in this work have been carried out at the Laser Zentrum Hannover (LZH) using a commercial Ti:Sapphire oscillator-amplifier system (Femtopower compact Pro, Femtolasers Produktions GmbH) at ambient conditions. A detailed description of the experimental setup is given in the literature (Koch et al, 2006). The laser system provides Gaussian laser pulses with a wavelength and a pulse length of λ = 800 nm and τ < 30 fs, respectively.…”
Section: Nonlinear Femtosecond Laser Processingmentioning
confidence: 99%
“…This wide emission band enables the generation of very short pulses and Ti:sapphire lasers are therefore preferred for biophotonics imaging [5], spectroscopy [6] or materials processing [7]. Ti:sapphire has its absorption peak located around 490 nm.…”
Section: Introductionmentioning
confidence: 99%
“…Laser direct-writing technology has made great progress in obtaining surface structures with spatial resolution exceeding the optical diffraction limit due to many advantages [5][6]. Many studies have been done to fabricate structures on different materials, such as Au [7], Cr [8], Ni [5], glass [9], and photoresist [10], by laser direct-writing technology. The structures in above mentioned are tapered or dome shaped, or even jet shaped, due to volume expansion of the material under laser irradiation.…”
Section: Introductionmentioning
confidence: 99%