Maskless Ultraviolet Projection Lithography with a Biorepelling Monomolecular Resist

Jeyachandran, Y.L.; Meyerbröker, Nikolaus; Terfort, Andreas; Zharnikov, Michael

doi:10.1021/jp510809a

Cited by 17 publications

(27 citation statements)

References 38 publications

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“…Our data on partial desorption of SAMs upon UV irradiation are coherent with results published by Leggett and Zharnikov, who described experiments of similar compounds in air − and aqueous conditions. In their work, they describe a dependence on the wavelength with the rate of degradation of the ethylene glycol chains while the alkanethiol part was primarily unaffected.…”

Section: Results and Discussionsupporting

confidence: 91%

Optically Assisted Surface Functionalization for Protein Arraying in Aqueous Media

et al. 2017

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Protein surface patterning is employed in a broad spectrum of applications ranging from protein microarray analysis to 2D cell organization. However, limitations arise because of the highly sensitive nature of proteins requiring careful handling to ensure their structural and functional integrity during the grafting process. Here, we describe a patterning protocol that keeps proteins in an aqueous environment during their immobilization, avoiding the loss of their biological activity. The procedure is based on the UV-mediated removal of polyethylene glycol self-assembled monolayers in a transparent microfluidic chamber, giving access to micrometric motifs of predefined geometries. Afterward, modified proteins can be grafted on the photopatterned domains. We also studied the influence of reactive oxygen species for a better understanding of the chemical mechanism involved in this process. Finally, as a proof of concept, a protein microarray was created with this process using cell-capturing antibodies to immobilize human blood cells, confirming the functionality of the arrayed proteins.

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Section: Results and Discussionsupporting

confidence: 91%

Optically Assisted Surface Functionalization for Protein Arraying in Aqueous Media

et al. 2017

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“…[104] IPER also served as an inspiration for an analogous approach utilizing ultraviolet light instead of electrons, which has several advantages, such as applicability in ambient and even liquid environments, but also drawbacks, such as a lower lateral resolution and less broad choice of commercial lithographic setups. [105][106][107][108][109] So far, IPER and IPER-based chemical lithography have been exclusively used for purely scientific purposes, but we envision that this technology will also be recognized and used by the industrial community, resulting in simplified fabrication routes and new nanotechnological products.…”

Section: Discussionmentioning

confidence: 99%

Electron‐Irradiation Promoted Exchange Reaction as a Tool for Surface Engineering and Chemical Lithography

Terfort

Zharnikov

2021

Adv Materials Inter

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tacting solutions, what, for example, is of relevance for the protection of materials from oxidation and degradation. Even more important, this assembly can modify or even redefine completely the chemical, physical, and biological properties of the substrate surface, adapting it to a specific task or an application. Finally, such a supported assembly can be functional on its own, for example, as an element of molecular or organic electronics [4][5][6][7] or a molecular sensor array. [8] A particular advantage of SAMs is the flexibility of their design. The SAMforming molecules consist generally of three major building blocks, videlicet the docking group mentioned above, the terminal tail group building the SAM-ambient interface, and the molecular backbone connecting the docking and tail groups and mediating the self-assembly. [1][2][3] Depending on a particular goal or a specific application, these buildings blocks can be flexibly selected and combined together as well as individually designed, for example, by the introduction of functional groups into the molecular backbone. [9,10] The resulting SAMs can be further modified by physical tools, such as ultra-violet light, electron irradiation, X-rays, and ions. Among these tools, electron irradiation is probably the most versatile one, as it gives the largest flexibility and provides the highest possible lateral resolution. It serves in particular well for tuning SAM properties, [11] fixation of metal films at the SAMambient interface, [12,13] SAM-based lithography and related nanofabrication, [14][15][16][17][18][19][20][21][22][23] as well as preparation of SAM-based carbon nanomembranes (CNMs). [24][25][26][27][28] All these applications rely on the specific effects of electron irradiation on the SAM-forming molecules and the SAMs as a whole. The major irradiationinduced processes include cleavage of individual chemical bonds within the SAM-forming molecules or between the docking groups and the substrate, desorption of the released molecules and their fragments, formation of new chemical groups as a result of reactions between electron-activated moieties, and cross-linking of the molecular fragments. [29][30][31] The occurrence, extent, and rates of the above processes as well as the balance between them depend on the electron energy, identity of the substrate, length of the molecular backbone, and packing density of a SAM but, above all, on the character of the molecular backbone. [31][32][33][34][35] Whereas the scission of nearly all bonds (CH, CC, Self-assembled monolayers (SAMs) can serve as versatile resist/template materials for surface engineering and electron beam lithography (EBL), making possible a new type of lateral patterning: chemical lithography (CL). Whereas CL has been well established for aromatic SAMs, it is hardly possible for aliphatic monolayers, because of extensive irradiation-induced damage excluding selective modification of specific chemical groups. Turning this drawback into an advantage, the irradiation-promoted exchange reactio...

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“…Patterning techniques have been initially developed for applications in semiconductor industry [1] and were later adopted to enable spatiotemporal protein immobilization as well as structuring of proteinbased materials. A plethora of techniques are available nowadays to realize protein pattern, such as micro-contact printing, [2][3][4][5][6] inkjet printing [7] and optical lithography [8][9][10] all of them enabling micropattern generation on large-scales. Interferometric lithography, [11] electron beam lithography, [12,13] dip pen nanolithography, [14][15][16][17] nanoimprint lithography, [18,19] scanning probe lithography, [20,21] nearfield lithography, [22,23] on the other hand provide pattern down to the nanometer scale.…”

Section: Introductionmentioning

confidence: 99%

Patterning of protein‐based materials

2020

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Micro‐ and nanopatterning of proteins on surfaces allows to develop for example high‐throughput biosensors in biomedical diagnostics and in general advances the understanding of cell‐material interactions in tissue engineering. Today, many techniques are available to generate protein pattern, ranging from technically simple ones, such as micro‐contact printing, to highly tunable optical lithography or even technically sophisticated scanning probe lithography. Here, one focus is on the progress made in the development of protein‐based materials as positive or negative photoresists allowing micro‐ to nanostructured scaffolds for biocompatible photonic, electronic and tissue engineering applications. The second one is on approaches, which allow a controlled spatiotemporal positioning of a single protein on surfaces, enabled by the recent developments in immobilization techniques coherent with the sensitive nature of proteins, defined protein orientation and maintenance of the protein activity at interfaces. The third one is on progress in photolithography‐based methods, which allow to control the formation of protein‐repellant/adhesive polymer brushes.

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Maskless Ultraviolet Projection Lithography with a Biorepelling Monomolecular Resist

Cited by 17 publications

References 38 publications

Optically Assisted Surface Functionalization for Protein Arraying in Aqueous Media

Optically Assisted Surface Functionalization for Protein Arraying in Aqueous Media

Electron‐Irradiation Promoted Exchange Reaction as a Tool for Surface Engineering and Chemical Lithography

Patterning of protein‐based materials

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