Mass-Sensitive Detection of Gas-Phase Volatile Organics Using Disk Microresonators

Truax, S.; Demirci, K.S.; Beardslee, Luke A.; Luzinova, Yuliya; Hierlemann, Andreas; Mizaikoff, Boris; Brand, Oliver

doi:10.1021/ac1029902

Cited by 24 publications

(12 citation statements)

References 34 publications

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“…Thermally excited, disk-type microstructures vibrating in a rotational in-plane mode have been investigated as effective resonant microsensor platform for gaseous and liquid environments (9,10). These resonators exhibited Q-factors in excess of 5,000 in air with typical in-plane resonance frequencies between 300-1000 kHz (9).…”

Section: Cantilever-based Resonant Chemical Sensor Platformmentioning

confidence: 99%

“…However, if the limit of detection is the ultimate measure for sensor performance, localized sensing film deposition can be advisable, because the gain in (short-term) frequency stability can overcome the sensitivity loss, thus improving the LOD. When the (polymeric) sensing film is uniformly coated across the resonator surface, the quality factor of the resonance and, thus, its shortterm frequency stability degrade quickly, resulting in a reduction of the limit of detection (10). Thereby, rubbery sensing films on top of mechanically strained regions of the resonator are particularly effective in increasing losses and, thus, degrading frequency stability.…”

Section: Localized Sensing Film For Noise Reductionmentioning

confidence: 99%

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(Invited) Cantilever-Based Resonant Chemical Microsensors

2016

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This paper reviews cantilever-based resonant chemical microsensors, which detect an analyte of interest via a change of the resonance frequency of a characteristic vibration mode, caused by the added mass upon sorption of the analyte into a sensing film deposited on the cantilever surface. While the focus of the paper is on silicon-based, hammer-like resonant sensors that comprise a head region suspended by a cantilever support structure, the results can be applied to other material systems and resonator geometries as well. The cantilever vibrations are excited electrothermally and sensed using four piezoresistors arranged in a Wheatstone bridge. Approaches to address the three 'S' metrics of chemical sensors, i.e., sensitivity, selectivity, and stability are highlighted. In particular, the benefits of localized deposition of the sensing film and the analysis of signal transients are explored. Mass-Sensitive Chemical SensorsWhile most chemical analyses are still performed today using bench-top analytical instruments, because of their high accuracy, high selectivity, and excellent reproducibility, there is an ever increasing demand for chemical sensors in applications that require fast response times, in-field sensing capabilities, portability and low-cost, even if they show reduced performance with respect to sensitivity, selectivity and stability compared to bench-top instruments. To this end, a wide variety of microfabricated chemical sensors utilizing either electrochemical, thermal, optical or gravimetric/mechanical transduction schemes have been explored over the past decades (1,2). This paper focuses on cantilever-based resonant chemical microsensors, which detect an analyte of interest via a change of the resonance frequency of a characteristic vibration mode, caused by the added mass upon sorption of the analyte into a sensing film deposited on the cantilever surface (3-6). Besides ease of fabrication, such mass-sensitive chemical microsensors benefit from a well-understood transduction mechanism and the fact that frequencies and frequency changes can be sensed with high accuracy. At a particular vibration mode, the resonance frequency f is determined by the effective spring constant k eff and effective mass m eff of the microstructure, resulting in a relative frequency change ∆f/f upon sorption of mass into the sensing film that depends on the effective mass change ∆m eff : f = $ %& k eff m eff ∆f f = -1 2 ∆m eff m eff [1] 10.1149/07517.0027ecst ©The Electrochemical Society ECS Transactions, 75 (17) 27-34 (2016) 27 ) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.239.1.231 Downloaded on 2017-04-24 to IP

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Section: Cantilever-based Resonant Chemical Sensor Platformmentioning

confidence: 99%

Section: Localized Sensing Film For Noise Reductionmentioning

confidence: 99%

(Invited) Cantilever-Based Resonant Chemical Microsensors

2016

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“…Furthermore, their high motional resistance and the need for a DC polarization voltage introduce difficulties for oscillator interfacing and increase system power consumption [6]. Thermally-actuated resonators, which also require DC voltages to operate, are power-hungry and susceptible to reduced analyte sensitivity as a result of sorption layer heating [7]. In contrast, low-power sensing is achievable using thin-film piezoelectric-on-substrate (TPoS) technology, which combines efficient piezoelectric transduction requiring no DC voltages with high-Q silicon resonators [8].…”

Section: Aln-on-silicon Sensors With Annexed Platformsmentioning

confidence: 99%

“…While analyte sorption on sensing areas results in mass loading of the resonant structure (causing a frequency downshift), it contributes minimally to damping of the extensional mode. As a result, the sensor maintains high Q in air, which ultimately impacts frequency stability and minimum limit of detection [7].…”

Section: A Sensor Design and Principle Of Operationmentioning

confidence: 99%

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High-<inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math></inline-formula> AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

Ayazi

2015

J. Microelectromech. Syst.

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Aluminum nitride (AlN) thin-film piezoelectric-onsilicon resonators optimized for gravimetric gas sensing are presented in this paper. Sensors with polyisobutylenefunctionalized annexed platforms exhibit a linear sensitivity of −0.09 Hz/ppm to toluene and −0.18 Hz/ppm to xylene. The annexed platform design enables the sensor to maintain a high Q of 3700 in air and low motional resistance of 1.1 k during operation, which ensures low-power oscillator interfacing and readout. AlN-on-Si resonators with annexed platforms are suitable for array implementation in environmental sensing microsystems that measure temperature, humidity, and various gases of importance to health and safety.[2013-0175]

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