Mass Spectrometric Investigation of the Pyrolysis of Diborane. Triborane and Tetraborane Intermediates

Baylis, A. B.; Pressley, George A.; Sinke, E. J.; Stafford, Fred E.

doi:10.1021/ja01077a080

Cited by 10 publications

(4 citation statements)

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“…The gas-phase decomposition of B 2 H 6 was studied by many researchers. [102][103][104][105][106][107][108][109] On the surface, B 2 H 6 is known to cause a non-self-limiting formation of solid boron. [109][110][111][112] The studies of Fehlner, [113][114][115][116] Baylis et al, 117 and Söderlund et al 118 suggested that BH 3 species dominate in the gas phase.…”

Section: A Surface-adduct Pathway For Purely Thermal Depositionmentioning

confidence: 99%

Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia

Apaydin

Onnink

Liu

et al. 2020

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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This work studies the deposition of boron/boron nitride (B/BN) composite films at low substrate temperature (275-375 °C) by alternating pulses of diborane (B 2 H 6 ) and ammonia (NH 3 ) with argon purging in between to avoid gas-phase reactions of the precursors. This process is similar to atomic layer deposition in which the dominance of surface reactions simplifies the growth mechanism. However, non-self-limiting decomposition of B 2 H 6 and incomplete nitridation lead to the incorporation of pure boron (pure-B), causing deviation from the desired 1:1 B:N stoichiometry. Using the pure-B fraction as a measure of incomplete nitridation, this article describes consecutive experiments to control this effect and ultimately understand it in the context of a surface reaction model. First, it is demonstrated that, in a purely thermal mode, the growth of the layers and their composition strongly depend on the total gas pressure. The pure-B content (not to be confused with the total boron content) could thus be varied in the range of ∼6-70 vol. %. Next, enhancement of nitridation by the dissociation of NH 3 into reactive radicals using a hot-wire was found to be insufficient to produce stoichiometric BN. Finally, plasma-assisted deposition at 310 °C resulted in nearly stoichiometric polycrystalline BN with an interplane distance matching that of hexagonal BN; the material was stable in air for at least six months. The pressure dependence in the purely thermal mode is consistent with a growth model of BN from B 2 H 6 and NH 3 via the so-called surface-adduct mechanism. The effects of the radical-enhanced methods on nitridation are explained using this model.

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Section: A Surface-adduct Pathway For Purely Thermal Depositionmentioning

confidence: 99%

Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia

Apaydin

Onnink

Liu

et al. 2020

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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show abstract

“…5, and also refs. 2j, 3e, 13,[16][17][18][19]. At various times the derived order of the reaction has been thought to be 1, 1, 3/2, 2, 5/2, or variable, but there is now general acceptance that, for the homogeneous gas-phase thermolysis of B2H6 in the pressure range of 10-760 mmHg and the temperature range 50-200 °C, the order of the initial stages of the reaction is 3/2.…”

Section: Thermolysis Of Diboranementioning

confidence: 99%

Kinetics of Boron Hydride Interconversion Reactions

Greatrex¹,

Greenwood²

1988

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“…Molecular beam mass spectra were obtained for B2H6, B4H8, B5H9, [30] and B 8 H I 2 [32], and for B4HIo, B 5 H l l , and B6H,, [32]. For the former, save B4H,, the molecular beam and literature spectra were in substantial agreement when magnetic scanning was used.…”

Section: -351mentioning

confidence: 99%

Reactive intermediates and molecular beam mass spectra of the boranes [1]

Stafford

1972

Bulletin des Soc Chimique

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Molecular beam mass spectrometric work on the lower boron hydrides is reported. Borane, BH3, and tetraborane (8), B4H8, were formed by reactions involving loss of BH3, CO, and, in the latter case, H2 from the appropriate molecules. This ensemble of reactions permitted unambiguous identification of each species. A route to B3H7 from B3H7PX3 is proposed. Investigation of the “stable” and “unstable” boranes and isotopically labelled molecules permits correlations of the mass spectra, determination of a structure ((B4H9)2), and identification of fragmentation pathways. Steady state pyrolysis in the ion source is particularly insidious. Because of it, previous appearance potential and theoretical fragmentation studies of e. g., B4H10 are virtually meaningless.

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Mass Spectrometric Investigation of the Pyrolysis of Diborane. Triborane and Tetraborane Intermediates

Cited by 10 publications

References 1 publication

Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia

Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia

Kinetics of Boron Hydride Interconversion Reactions

Reactive intermediates and molecular beam mass spectra of the boranes [1]

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