MAST-SEY: MAterial Simulation Toolkit for Secondary Electron Yield. A monte carlo approach to secondary electron emission based on complex dielectric functions

Polak, Maciej P.; Морган, Д.

doi:10.1016/j.commatsci.2021.110281

Cited by 13 publications

(3 citation statements)

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“…Previous works have demonstrated that some of these parameters, for example SEECs, can be determined under plasma exposure by computationally assisted diagnostics [39] and combinations of current measurements and modeling [40,41]. Alternatively, they can be calculated based on ab initio models [42][43][44][45]. Typically, however, such surface coefficients are either neglected, guessed, or taken from beam-experiments performed under ultra-high vacuum conditions without plasmas that typically modify the surface.…”

Section: Introductionmentioning

confidence: 99%

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Schulenberg

Korolov

Derzsi

et al. 2021

Plasma Sources Sci. Technol.

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The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a standard and well-established tool in studies of capacitively coupled radio frequency (RF) plasmas. While code-to-code benchmarks have been performed in some cases, systematic experimental validations of such simulations are rare. In this work, a multi-diagnostic experimental validation of 1d3v electrostatic PIC/MCC simulation results is performed in argon gas at pressures ranging from 1 Pa to 100 Pa and at RF (13.56 MHz) voltage amplitudes between 150 V and 350 V using a custom built geometrically symmetric reference reactor. The gas temperature, the electron density, the spatio-temporal electron impact excitation dynamics, and the ion flux-energy distribution at the grounded electrode are measured. In the simulations, the gas temperature and the electrode surface coefficients for secondary electron emission and electron reflection are input parameters. Experimentally, the gas temperature is found to increase significantly beyond room temperature as a function of pressure, whereas constant values for the gas temperature are typically assumed in simulations. The computational results are found to be sensitive to the gas temperature and to the choice of surface coefficients, especially at low pressures, at which non-local kinetic effects are prominent. By adjusting these input parameters to specific values, a good quantitative agreement between all measured and computationally obtained plasma parameters is achieved. If the gas temperature is known, surface coefficients for different electrode materials can be determined in this way by computationally assisted diagnostics. The results show, that PIC/MCC simulations can describe experiments correctly, if appropriate values for the gas temperature and surface coefficients are used. Otherwise significant deviations can occur.

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Section: Introductionmentioning

confidence: 99%

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Schulenberg

Korolov

Derzsi

et al. 2021

Plasma Sources Sci. Technol.

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show abstract

“…29 Extensions of DFT-like time dependent density functional theory (TDDFT) attempt to address this and can give results in good comparison to experiments for molecules and smaller structures. 30,31 TDDFT has been applied to solids like Cu and has been claimed to give better comparison with experiments compared to optical data models, 32,33 but in such a material, even ground-state DFT gives good agreement with the experiments. 27 Electrons in a metal like Cu experience more screening, which makes many-body effects from excitations less significant, 29 so it is unclear what improvements to the IMFP arise from TDDFT alone.…”

Section: Model Improvementmentioning

confidence: 99%

Model validation for scanning electron microscopy

Ridzel

Yamane

Mansaray

et al. 2023

Metrology, Inspection, and Process Control XXXVII

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We are beginning projects to validate the physics models used for interpretation of electron microscopy images. In one of them, we will measure electron yields and energy spectra from cleaned well-characterized samples subjected to electron bombardment inside of a spherical retarding field analyzer in ultra-high vacuum. In another, we will measure the same features, lithographically patterned on free-standing Si membranes, with measurement techniques that differ in their interaction physics. A modeling project will compare measurement results with simulations using existing and new models. Good models should predict the observed yields and produce agreement among measurement techniques.

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“…With the development of science and technology, simulation and modelling techniques are becoming more and more mature and stable. The Monte Carlo simulation method is a powerful tool to study the phenomenon of secondary electron emission [19][20][21][22]. This method is characterized by higher efficiency, faster time, and lower cost than experimental measurements.…”

Section: Introductionmentioning

confidence: 99%

Modelling the Impact of Graphene Coating of Different Thicknesses on Polyimide Substrate on the Secondary Electron Yield

Qi,

Ma,

Liu

et al. 2023

Coatings

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Polyimide material is widely used in the aerospace field, but its secondary electron emission yield is high. In this study, a graphene coating was used to suppress its secondary electron emission, and the secondary electron emission yield of graphene-coated materials with different thicknesses was calculated using the GEANT4 numerical simulation method. The suppression effect of different thicknesses of graphene coatings on the secondary electron emission was analyzed. The simulation results showed that the optimal graphene coating thicknesses for the lowest secondary electron yield of polyimide materials were 1 nm and 5 nm, which reduced the secondary electron emission yield by 13% in terms of simulation. The 5 nm graphene coating reduced the secondary electron emission yield by 6% compared to the polyimide material from an experimental perspective. The 5 nm coating showed better results at higher energies and was experimentally verified by preparing five layers of graphene coating, which showed good agreement between the simulation and experiment. Meanwhile, with the increase in graphene coating thickness, the surface secondary electron emission displacement range decreased, and the secondary electrons produced at the surface were of low energy. The results of this study can provide technical reference for polyimide in aerospace applications and secondary electron emission simulation.

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MAST-SEY: MAterial Simulation Toolkit for Secondary Electron Yield. A monte carlo approach to secondary electron emission based on complex dielectric functions

Cited by 13 publications

References 50 publications

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Model validation for scanning electron microscopy

Modelling the Impact of Graphene Coating of Different Thicknesses on Polyimide Substrate on the Secondary Electron Yield

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