Master and slave control of a dual-stage for precision positioning

Abstract

Master/Slave control of a Dual-stage for precision positioning with application to IC production is presented. Configuration and work principle of ultra precision positioning stage are pictured. By adopting merits of both coarse and fine stage, a desired motion control system having the capacity of large workspace with high resolution of motion is enabled. Identification method of mechatronics system such as precision positioning stage is described and done based closed-loop control. The automated synthesis procedure of controller is developed using loop shaping techniques. Force decoupling strategy is introduced under the consideration of reality in practice. The simulation and experiment results show that the positioning precision achieves to 10 nanometers using dual stage. Index Terms -Master/slave control; dual-stage; loop shaping; force control; nanometer.

Low-stiffness dual stage actuator for long rage positioning with nanometer resolution

“…In (8), the friction force D c ðsÞ in (7) is included in the process noise w. The system's observability can be checked by the observability matrix U o . In the case that the system is observable, U o has full rank, and its determinant in the following equation is non-zero…”

“…Particularly Lorentz actuators are commonly used due to their high linearity [7]. They are often combined with commutated motors [8][9][10] and applied to wafer scanners for lithography [11], as well as to robot arms for automatic assembly [12]. In these systems, the movable parts are suspended typically pneumatically or magnetically to ensure zero stiffness.…”