1996
DOI: 10.1016/s0167-2738(96)00489-4
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Materials for lithium thin-film batteries for application in silicon technology

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Cited by 116 publications
(51 citation statements)
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“…In this way, allsolid-state lithium-ion rechargeable microbatteries have attracted much interest, because these materials have improved many problems of secondary microbatteries while retaining most of their favorable features. [1][2][3] However, the major difficulty in fabricating these microbatteries is ascribed to the ability to prepare lithiated intercalation cathode films; thus, such preparations have been intensively investigated. [1][2][3][4][5] Unfortunately, all the synthetic approaches described in previous works to fabricate thin-film positive electrodes have been entirely focused on sophisticated multistep processes.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…In this way, allsolid-state lithium-ion rechargeable microbatteries have attracted much interest, because these materials have improved many problems of secondary microbatteries while retaining most of their favorable features. [1][2][3] However, the major difficulty in fabricating these microbatteries is ascribed to the ability to prepare lithiated intercalation cathode films; thus, such preparations have been intensively investigated. [1][2][3][4][5] Unfortunately, all the synthetic approaches described in previous works to fabricate thin-film positive electrodes have been entirely focused on sophisticated multistep processes.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] However, the major difficulty in fabricating these microbatteries is ascribed to the ability to prepare lithiated intercalation cathode films; thus, such preparations have been intensively investigated. [1][2][3][4][5] Unfortunately, all the synthetic approaches described in previous works to fabricate thin-film positive electrodes have been entirely focused on sophisticated multistep processes. These processes include the following: preparation of a bulk cathode material or its precursors; deposition or integration onto/into substrates using chemical vapor deposition, sputtering, or laser ablation deposition; the formation of shape; size; and orientation.…”
Section: Introductionmentioning
confidence: 99%
“…Electrochromic devices [13] or special battery applications [14] require application of electrodes in the form of thin films. In this regard a number of thin film techniques was reported.…”
Section: Thinmentioning
confidence: 99%
“…Furthermore, transparent materials can be used in energy harvest and storage that it may be a window in the near future. Transparent electronic devices play an important role for the electronic devices (Bates et al, '95;Yang et al, 2011;Brazier et al, 2008). Transparent battery materials and thin film batteries have been investigated some research groups.…”
Section: Introductionmentioning
confidence: 99%