A combined boundary element method ͑BEM͒-finite element method ͑FEM͒ numerical approach is used for the simulation of current density and layer thickness distributions in a wafer plating reactor. The current and potential distribution effects due to the electrolyte resistivity are modeled with BEM, while the transient internal resistive 'terminal' effect of the wafer is modeled using FEM. A nonlinear Butler-Volmer type overpotential relation is considered to describe cathode kinetics. The declining internal wafer resistivity that is due to the growth of the initial copper seed layer, is modeled over a number of discrete time steps. Different contacting methods ͑4 or 8 contact points, ring contact͒ are investigated, and their terminal effect time is compared. The wafer consists of a ring-shaped current thief, with adjacent photoresist area's and a central electroactive patterned zone.Modeling current density distributions in electrochemical reactors has become common practice over the last few decades. A first general class of models is based on a complete description of the multi-ion transport ͑migration, convection, and diffusion͒ and electrode reactions ͑MITRe͒. 1 These MITRe models have been solved for two-dimensional ͑2D͒ reactor cross-sections with various numerical techniques, and for different process types. In most cases however, simulations are based on models with important simplifications. Even now, papers dealing with unsimplified MITRe models are scarce. For example, Georgiadou and Alkire presented results for an etching process, based on the finite difference method ͑FDM͒, in combination with an upwind scheme for the convection. 2 Bortels et al. used finite volumes ͑with a convection upwind scheme͒ for a copper deposition process. 3 More recently, Leah et al. modeled a chlor-alkali reactor with an FDM approach. 4 A second class of ͑simplified͒ models is based on the description of ohmic drop effects in the electrolyte ͑Laplace model, primary current density distributions͒, in most cases combined with linear or nonlinear electrode polarization/current density relations ͑secondary current density distributions͒. 5 The validity and accuracy of these 'potential' models depends on the rate of stirring or electrolyte refreshment in the reactor ͑compared to the range of applied current densities͒, enabling to neglect convective diffusion mass transfer problems. Papers presenting potential model results for 2D or axisymmetrical ͑AX͒ reactor cross-sections are widespread. For example Matlosz et al. 6 studied primary and secondary current density distributions in a Hull cell. Simulated results using the boundary element method ͑BEM͒ and the finite element method ͑FEM͒ agreed well. Mehdizadeh et al. 7 used BEM to examine the influence of a coplanar auxiliary electrode ͑current thief͒ on the uniformity of the current density on a flat electrode. More recently, Subramanian and White presented a semi-analytical method for solving potential models with nonlinear electrode polarization. 8 The practical relevance of...