Me3SiCC–CMeCH2 copper(I) β-diketonates: Synthesis, solid state structure, and low-temperature chemical vapour deposition

Copper(I) Alkyne and Alkynide Complexes

“…An extended family of copper­(I) alkyne molecules are β-diketonate complexes of the type [Cu­(β-diketonate)­L] ( 36 ) with L = alkyne or alkyne-ene (Figure ). − Complexes of this type, including [Cu­(hafc)­(η 2 -PhCCPh)], react rapidly with, for example, hydrogen sulfide gas, and quantitative conversion is apparently enabled by the displacement of the ligands, resulting in the formation of porous Cu 2 S. It was found that the rates of reaction were faster than those of commonly used absorbents, and hence such compounds are discussed for gas cleanup and chemical analysis of hydrogen sulfide . In addition, copper­(I) β-diketonate complexes 36 are useful in the chemical vapor deposition (=CVD) of pure copper layers or patterns on diverse substrates, since this process is considered as an alternative method for interconnect metalization in future generations of submicrometer integrated circuits, due to, for example, the low resistivity and superior electron migration resistance of copper. ,− Typically, these molecules consist of a strongly bonded β-diketonate ligand and a second, weakly bonded two-electron-donor group and hence are monomeric 16-valence-electron species in which the Cu­(I) center is tricoordinated by the chelating β-diketonate ligand and the datively bonded Lewis base L (Figure and Table ).…”

“…Furthermore, alkyne copper­(I) carboxylates, β-diketonates, and formates can successfully be applied as Cu CVD and Cu spin-coating precursors for copper deposition. ,,, For example, the structure of {[Ti]­(μ-σ,η 2 -CCSiMe 3 ) 2 }­CuO 2 CH·HO 2 CR was determined, showing a 3-fold-coordinated copper­(I) ion set up by two π-bonded alkyne ligands and one oxygen atom. A formic acid building block is additionally hydrogen-bonded to the [CuO 2 CH] moiety .…”