9 Be induced nuclear reaction / Stacked-foil technique / Proton rich / 93,94,95 Tc / Production yield / Liquid-liquid extraction / Solid-liquid extraction Summary. Proton rich Tc radionuclides have been produced for the first time through 89 Y( 9 Be, xn) 93,94,95 Tc reactions. In order to optimize the yield of a particular radionuclide of choice, batch yield of 93 Tc, 94 Tc and 95 Tc have been measured at different incident energies using stacked-foil technique followed by off-line γ -spectrometry. No-carrier-added (nca) 93,94,95 Tc radionuclides have been separated from bulk yttrium by liquid-liquid extraction (LLX) and solid-liquid extraction (SLX) techniques. Trioctylamine (TOA) diluted in cyclohexane was used as liquid anion exchanger in LLX in presence of HCl. SLX was carried out using cation and anion exchanger resin, DOWEX-50 and DOWEX-1, respectively, in HCl medium.