Abstract— A measurement method for the determination of the cell parameters of vertically aligned nematic LCOS devices has been developed. It provides the values for the pre‐tilt angle and the cell thickness in a reliable way, without the need for spectroscopic instruments. The method uses oblique incidence to separate the determination of pre‐tilt angle and cell thickness from each other and thus enhance the measurement accuracy. As a bonus, the measurement system consists only of simple optical components and does not need costly instruments.