MOEMS and Miniaturized Systems IV 2004
DOI: 10.1117/12.532340
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Measurement of a laterally deformable optical MEMS grating transducer

Abstract: We have experimentally demonstrated operation of a laterally deformable optical NEMS grating transducer. The device is fabricated in amorphous diamond on a silicon substrate with standard lithographic techniques. For small changes in the spacing of the grating elements, a large change in the optical reflection amplitude is observed. An in-plane motion detection sensitivity of 160 1hi/'IHz has been measured, which agrees well with theoretical models. This sensitivity compares favorably to that of any other MEMS… Show more

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Cited by 7 publications
(4 citation statements)
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“…Wood's anomaly was first discovered in 1902, which manifests itself as a considerable increase or decrease in the intensity of reflective waves from a grating due to the small variation of the grating structure [63][64][65][66]. Since 2003, Krishnamoorthy and Carr at the Sandia National Laboratory and Symphony Acoustics used this effect to measure small motion [67][68][69][70][71]. Their work was underpinned with rigorous analysis [67], experimental verification [68] as well as an application to an optical accelerometer [69][70][71].…”
Section: Optical Mems Accelerometersmentioning
confidence: 99%
See 1 more Smart Citation
“…Wood's anomaly was first discovered in 1902, which manifests itself as a considerable increase or decrease in the intensity of reflective waves from a grating due to the small variation of the grating structure [63][64][65][66]. Since 2003, Krishnamoorthy and Carr at the Sandia National Laboratory and Symphony Acoustics used this effect to measure small motion [67][68][69][70][71]. Their work was underpinned with rigorous analysis [67], experimental verification [68] as well as an application to an optical accelerometer [69][70][71].…”
Section: Optical Mems Accelerometersmentioning
confidence: 99%
“…Since 2003, Krishnamoorthy and Carr at the Sandia National Laboratory and Symphony Acoustics used this effect to measure small motion [67][68][69][70][71]. Their work was underpinned with rigorous analysis [67], experimental verification [68] as well as an application to an optical accelerometer [69][70][71]. Their integrated sub-wavelength optical nano-grating MEMS accelerometers demonstrated a sensitivity of 590 V/g and a noise floor of 17 ng/ √ Hz (at 1 Hz).…”
Section: Optical Mems Accelerometersmentioning
confidence: 99%
“…Such position-sensitive devices have previously been realized with pairs of coupled sub-wavelength gratings [1], and with resonant nanocavities based on coupled periodic nanostructures embedded inside a Fabry-Perot cavity [2]. In this paper we are presenting a 2-D photonic crystal (PC) that is designed to achieve high position sensitivity by making the symmetry of the PC modes depend on the position of the PC relative to its substrate.…”
Section: Introductionmentioning
confidence: 98%
“…Typical examples of such application are optical filter [4], guided-mode resonant filter (GMRF) [5][6], high speed laser scanning [7]. Recently, Dustin presented a novel grating design based on Wood's anomaly and demonstrated his work with rigorous analysis [8], experimental test [9] as well as following application in an optical accelerometer [10][11]. This device gives out rapid variation of reflective intensity with small lateral displacement in nanometer scale and is quite sensitive to incident wavelength, which make it very suitable for small displacement detection and beamsplitting switch.…”
Section: Introductionmentioning
confidence: 99%