Measurement of acoustic properties of liquid using liquid flow SH-SAW sensor system

Nomura, T.; Saitoh, A.; Horikoshi, Yuta

doi:10.1016/s0925-4005(01)00571-8

Cited by 58 publications

(41 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This structure not only allows deposition of highly c-axis oriented AIN due to the low surface roughness of the nucleation side, but also the membrane is free to move so it provides pressure sensitivity. Furthermore, in some sensor systems, the property to be analysed can be more precisely controlled if a cavity can be fabricated in the structure [27]. On the other hand, the choice of the piezoelectric film thickness implies a compromise between the frequency and the intensity of the targeted resonances, as discussed previously [12].…”

Section: Introductionmentioning

confidence: 99%

High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid

Iriarte

Williams

et al. 2013

Sensors and Actuators A: Physical

100

View full text Add to dashboard Cite

In this paper, an AIN/free-standing nanocrystalline diamond (NCD) system is proposed in order to process high frequency surface acoustic wave (SAW) resonators for sensing applications. The main problem of synthetic diamond is its high surface roughness that worsens the sputtered AIN quality and hence the device response. In order to study the feasibility of this structure, AIN films from 150 nm up to 1200 nm thick have been deposited on free-standing NCD. We have then analysed the influence of the AIN layer thickness on its crystal quality and device response. Optimized thin films of 300 nm have been used to fabricate of one-port SAW resonators operating in the 10-14 GHz frequency range. A SAW based sensor pressure with a sensibility of 0.33 MHz/bar has been fabricated.

show abstract

Section: Introductionmentioning

confidence: 99%

High precision pressure sensors based on SAW devices in the GHz range

Rodríguez-Madrid

Iriarte

Williams

et al. 2013

Sensors and Actuators A: Physical

100

View full text Add to dashboard Cite

show abstract

“…Humidity sensors have been manufactured using polymer sensitive to wet air, such as polyimid (Bernou et al 2000). Although SAW sensors are no suitable to be used in liquid-phase because of their propagation loss inside the liquid interface (Tong and Zhang 1999), some authors have used them to measure the flow of liquid samples (Nomura et al 2001), or to determine the liquid density and viscosity with a Love-mode acoustic sensor (Herrmann et al 1999). Finally, SAW sensors are also used in scientific areas as different as biochemistry, electrochemistry (Ballantine and Wohltjen 1989) and immunosensing (Freudenberg et al 2001).…”

mentioning

confidence: 99%

Sensors: From biosensors to the electronic nose

García‐González

Aparicio

2002

Grasas y Aceites

View full text Add to dashboard Cite

“…A detailed description of both the effects of the mechanical and electrical properties of a liquid on the attenuation and velocity of a two-port resonator has been reported by Nomura et al [25].…”

Section: Frequency Response In An Ionic Liquidmentioning

confidence: 99%

“…The changes in velocity v (proportional to phase ) and attenuation  can be related to both the conductivity  and dielectric permittivity  of the liquid, and also the viscosity  and the density  of the liquid (relative to a reference or baseline liquid) [25].…”

Section: Principle Of Operationmentioning

confidence: 99%

See 1 more Smart Citation

Surface acoustic wave based analytical system for the detection of liquid detergents

Vivancos¹,

Rácz²,

Cole³

et al. 2012

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

A novel analytical sensing system has been designed for the characterization and discrimination of different detergents in water. This micro-sensor system could play a key role in the development of more efficient and environmentally-friendly washing machines by enabling the measurement of residual detergents. The sensing system comprises a dual shear-horizontal surface acoustic wave (SH-SAW) resonator sensor housed within a poly-dimethylsiloxane (PDMS) microfluidic chamber. Free and electrically-shorted SAW designs were used to analyze synthetic samples of liquid detergents with varying concentrations. Two anionic surfactants, namely sodium dodecylbenzene sulfonate and sodium laureth sulphate, and one non-ionic surfactant, polyoxyethylene (9.5) t-octylphenol have been studied. Dilution tests have been performed in order to determine the sensitivity or detection limit of this liquid sensing system and have been found to be ca. 10 ppm. The SAW based sensor system correctly classified all three detergents through the use of the transient signal response. Because the sensor operates without the need for a selective chemical or biological coating, it should be both robust and reliable. We believe that such technology could be used to make environmentallyfriendly and greener washing machines by minimizing the use of detergents and hot water.

show abstract

Measurement of acoustic properties of liquid using liquid flow SH-SAW sensor system

Cited by 58 publications

References 7 publications

High precision pressure sensors based on SAW devices in the GHz range

High precision pressure sensors based on SAW devices in the GHz range

Sensors: From biosensors to the electronic nose

Surface acoustic wave based analytical system for the detection of liquid detergents

Contact Info

Product

Resources

About