Measurement of SAW Velocity Versus Strain for YX and ST Quartz

Seismic Vibration Sensor with Acoustic Surface Wave

“…These SAW-based sensors are used to measure a number of physical quantities: gas concentration [5][6][7][8], temperature, pressure [9][10][11][12][13], and mechanical quantities: torque of a rotating shaft [14], stress [15][16][17], acceleration [18][19] and vibrations [20][21]. All these SAW-based sensors work on the basis of measuring changes in the delay of a surface wave due to the impact of a physical quantity being measured on its speed and the propagation path.…”

Acoustic Wave Based MEMS Devices, Development and Applications

“…Any variations to the characteristics of the propagation path affect the velocity or amplitude of the wave. Important application for acoustic wave devices as sensors include torque and tire pressure sensors (Cullen et al, 1980;Cullen et al, 1975;Pohl et al, 1997), gas sensors (Levit et al, 2002;Nakamoto et al, 1996;Staples, 1999;Wohltjen et al, 1979), biosensors for medical applications (Andle et al, 1995;Ballantine et al, 1996;Cavic et al, 1999;Janshoff et al, 2000), and industrial and commercial applications (vapor, humidity, temperature, and mass sensors) (Bowers et al, 1991;Cheeke et al, 1996;Smith, 2001; N. J. Vellekoop et al, 1999;Vetelino et al, 1996;Weld et al, 1999).…”

Analysis and Modeling of Surface Acoustic Wave Chemical Vapor Sensors

“…These changes cause velocity and phase delay variations, which then proportionally change the centre frequency, attenuation and time delay of the device. The first reported use of SAW technology for a sensor application was in 1975 for pressure sensing [Cullen & Reeder, 1975;Cullen & Montress, 1980]. SAW temperature sensors have millidegree resolution, good www.intechopen.com linearity, fast response, and low hysteresis [Pohl, 2000] [Wohltjen & Dessy, 1979;Wohltjen, 1982].…”