Measurement of Surface Profile Using Smoothed Serial Three Point Method.

Kounosu, Kenji; Kishi, Tomoaki

doi:10.2493/jjspe.61.641

Cited by 5 publications

(5 citation statements)

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“…Another way to achieve high-accuracy measurement is to use the multi-sensor error separation method to eliminate the influence of the straightness error of the guideway [8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26]. Based on the self-calibration measurement principle, it is not necessary to use a high-accuracy guideway.…”

Section: Introductionmentioning

confidence: 99%

“…However, the yaw error of the scanning stage could not be eliminated. To eliminate yaw error, three-probe methods have been proposed [9,10], including the sequential three-probe method, combined three-probe method, and generalized three-probe method. Although the three-probe method can eliminate yaw error, the systematic error between the three probes introduces a parabolic cumulative term in the profile evaluation result, which is the largest error source in these methods [11].…”

Section: Introductionmentioning

confidence: 99%

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Novel scanning system with error separation for high-accuracy profile measurement

Guo¹,

Zhai²,

Chen³

et al. 2022

Meas. Sci. Technol.

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This paper proposes a method based on a single-probe scanning system for measuring the profile error of an artifact. Our system employs the movement accuracy of a single sensor to achieve a virtual multi-sensor configuration that can function like a traditional multi-sensor. This novel virtual multi-probe scanning system and its corresponding method have the following benefits: (a) A high-accuracy profile can be reconstructed free of the guidance error of the scanning stage. The reconstructed profile has a very high lateral resolution, depending on the lateral resolution (µm level) of the probe. (b) Sensor drift can be restrained using our method, based on the principle of differential reconstruction. The high steep profile can also be measured with a scanning system moving along the measuring direction, thus extending the measuring range. We developed the measurement system and tested the effects of noise, drift, and other factors on the reconstruction results. Finally, some optical surfaces were measured, and comparisons were made between the results obtained from our method and those of a Zygo interferometer. There was high agreement between the two methods, with a deviation of approximately 0.1 μm.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Novel scanning system with error separation for high-accuracy profile measurement

Guo¹,

Zhai²,

Chen³

et al. 2022

Meas. Sci. Technol.

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show abstract

“…However, the yaw error of the scanning stage cannot be eliminated. To eliminate the yaw error three-probe methods are proposed [9]- [10], including the sequential three-probe method (STRP), the combined threeprobe method (CTRP), and the generalized three-probe method (GTEP). Although the three-probe methods can eliminate the yaw error, the zero-adjustment error between the three probes will introduce a parabolic cumulative term in the profile evaluation result, which is the largest error source for straightness measurement of the long workpiece profile [11].…”

Section: Introductionmentioning

confidence: 99%

High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

2020

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We present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and driven by a voice coil motor to realize the function of the multi-probe. In this work, a high accuracy profile measurement with a high lateral resolution is realized under the errors of the straightness, zero-adjustment, and yaw. The new method can obtain multiple sets of straightness error of the guideway in one scanning measurement. This novel virtual multi-probe scanning system and its corresponding method has the following benefits: (i) using a single probe to separate straightness error without reversal, and can accurately reconstruct the profile, (ii) the reconstructed profile has a very high lateral resolution, depending on the lateral resolution (μm level) of the probe, (iii) the cumulative amplification effect of zero-adjustment error can be eliminated by our method, (iv) the new method can obtain multiple sets of straightness error with higher reliability and accuracy compared with only one set. These benefits are proved by theoretical derivation and simulation. Experiments also prove that the new method can reconstruct the profile with high accuracy and lateral resolution.

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“…This is often referred to as the parallelism of the two rails. There are several methods that are used to obtain a measure of the straightness of each rail [1,2], such as the reversal [3][4][5], sequential two-point [6][7][8][9][10][11], and multi-probe [12][13][14][15][16] methods. These methods generally acquire deviation profiles by eliminating a linear fitted inclined curve; however, they seldom provide information about the relative distance between the pair of rails [17].…”

Section: Introductionmentioning

confidence: 99%

A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways

Hwang

Park

Gao

et al. 2007

International Journal of Machine Tools and Manufacture

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Measurement of Surface Profile Using Smoothed Serial Three Point Method.

Cited by 5 publications

References 0 publications

Novel scanning system with error separation for high-accuracy profile measurement

Novel scanning system with error separation for high-accuracy profile measurement

High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System

A three-probe system for measuring the parallelism and straightness of a pair of rails for ultra-precision guideways

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