Proceedings of the 1997 1st Electronic Packaging Technology Conference (Cat. No.97TH8307)
DOI: 10.1109/eptc.1997.723923
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Measurement of thermally induced warpage of BGA packages/substrates using phase-stepping shadow moire

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Cited by 33 publications
(12 citation statements)
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“…Shadow moiré and projection moiré are noncontact and nondestructive detecting methods for measuring out-of-plane displacements and can be make on-line, full-field measurements. Shadow moiré is the preferred method for larger samples, and projection moiré is more suit for smaller sample size [1]- [3]. In this paper, the simple nondestructive shadow moiré technique would be taken for discussing the warpage issues associated with the warpage deformation of silicon wafer.…”
Section: Introductionmentioning
confidence: 98%
“…Shadow moiré and projection moiré are noncontact and nondestructive detecting methods for measuring out-of-plane displacements and can be make on-line, full-field measurements. Shadow moiré is the preferred method for larger samples, and projection moiré is more suit for smaller sample size [1]- [3]. In this paper, the simple nondestructive shadow moiré technique would be taken for discussing the warpage issues associated with the warpage deformation of silicon wafer.…”
Section: Introductionmentioning
confidence: 98%
“…This thermo-moire (TM) technique and equipment is common within the industry and is consistent with JEDEC specification [2,7]. The output of this warpage measurement method is a two-dimensional plot of the warpage along each package diagonal, a three-dimensional contour plot of the substrate surface, and warpage data (mean, minimum, maximum) for each package measured (see Figure 5).…”
Section: Evaluation Methodologymentioning
confidence: 98%
“…To increase the sensitivity of the Shadow Moiré technique the Thermoiré PS88+ applies the phase stepping method, where use is being made of the grey level information contained in the fringe pattern so that the fractional fringe order may be resolved [9,10].…”
Section: Measurement Principlementioning
confidence: 99%