Measurement of Thin Film Parameters with a Prism Coupler

Ulrich, R.; Torge, R.

doi:10.1364/ao.12.002901

Cited by 917 publications

(338 citation statements)

References 9 publications

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“…The incident light was polarized parallel to the surface, so the positions can be identified as the TE 0 -TE 5 modes. Although the entrance position of the laser beam spot into the prism was carefully adjusted according to a method proposed by Ulrich and Torge, 19 only a limited angular interval can be scanned. The laser spot moves on the base plane of the prism and causes the broad peak in the bright-line spectrum of Fig.…”

Section: B Optical Characterizationmentioning

confidence: 99%

Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO

Beckers

Schubert

Zander

et al. 1998

Journal of Applied Physics

104

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Epitaxial waveguide structures of c-axis oriented BaTiO 3 thin films on MgO͑001͒ have been grown by pulsed laser deposition. The structural properties of the samples have been characterized by Rutherford backscattering spectrometry/ion channeling ͑RBS/C͒, x-ray diffraction, and atomic force microscopy. We found excellent crystalline quality even up to thicknesses of a few microns. This has been confirmed by RBS/C minimum yield values of 2%-3%, a full width at half maximum of 0.36°of the BaTiO 3 ͑002͒ rocking curve, and a rms roughness of 1.1 nm for a 950 nm BaTiO 3 film. The out-of-plane refractive index was measured to be close to the extraordinary bulk value with the birefringence being about one third of the bulk value. Waveguide losses of 2.9 dB/cm have been demonstrated.

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Section: B Optical Characterizationmentioning

confidence: 99%

Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO

Beckers

Schubert

Zander

et al. 1998

Journal of Applied Physics

104

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“…For this, we have implemented a prism-film coupling technique [6]. The setup, fully automated, is shown in Fig.…”

Section: Monomode Waveguidesmentioning

confidence: 99%

“…are typical examples [1][2][3][4]. Different techniques have been used to calculate the refractive index and thickness of the polymeric guiding layer; however, all proposals have been applied only to multimode optical waveguides [5,6]. The fabrication of MZI with polymeric optical waveguides requires previous processes on the polymer before the final guide is obtained.…”

Section: Introductionmentioning

confidence: 99%

Refractive Index and Thickness Evaluation of Monomode and Multimode Step-Index Planar Optical Waveguides Using Longitudinal Section Magnetic (Lsm) and Longitudinal Section Electric (Lse) Formulation

Gavela¹,

Presa²,

Granda³

et al. 2013

PIER B

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Abstract-In this work, we demonstrate that the LSM and LSE modes formulation is an excellent theoretical tool for determining the refractive index and thickness of the guiding layer in planar optical waveguides with step refractive index profile. Refractive index of transparent materials capable of being deposited as a solid thin layer on a substrate for confining light can be evaluated very accurately. The method can be applied to analyze and design monomode and multimode optical waveguides, unlike the methods proposed so far, including cutoff wavelength region. This wave model only requires the experimental evaluation of the effective indices of the guided modes. In order to verify the developed formulation, the commercial software Olympios was used for theoretical comparison. Polymeric planar optical waveguides were fabricated and characterized. A prism coupling method and the Metricon system were used for effective indices measurements and to compare the accuracy. The experimental evaluation of the thickness was carried out by profilometry. In all cases a complete agreement was obtained for refractive index and thickness between theory and experiments.

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“…The latter allows to determine the refractive index and the thickness of the PZT films [6,7,8]. The M-lines technique is based on the use of a prism of refractive index higher than that of the PZT (in our case ZnSe) which is pressed on the thin film (see Fig.…”

Section: Experimental Techniquesmentioning

confidence: 99%

Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application

Gundel¹,

Cardin²,

Averty³

et al. 2003

Ferroelectrics

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In order to develop optical waveguide structures using Pb(ZrTi)O 3 ferroelectric thin films, chemical solution deposition and spin-coating on glass substrates were studied. Classical photolithography and wet chemical etching method were applied for the realization of linear and Mach-Zehnder type waveguide structures, having a width of up to 100 "m and a irregularity of the border in the 1 "m region for an overall length of 20 mm. Optical characterization allows to qualify the ferroelectric material in terms of use for telecommunication applications, coupling of laser light by the M-lines technique allows to study light propagation and the related propagation losses.

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Measurement of Thin Film Parameters with a Prism Coupler

Cited by 917 publications

References 9 publications

Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO

Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO

Refractive Index and Thickness Evaluation of Monomode and Multimode Step-Index Planar Optical Waveguides Using Longitudinal Section Magnetic (Lsm) and Longitudinal Section Electric (Lse) Formulation

Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application

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