Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures

Taylor, Ryan P.; Nellis, Gregory; Klein, S.A.; Hoch, Daniel; Fellers, John F.; Roach, Pat R.; Park, J. M.; Gianchandani, Yogesh B.

doi:10.1063/1.2192352

Cited by 24 publications

(13 citation statements)

References 1 publication

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“…8, as the temperature decreases, the PZT actuation has a decreased effect on flow rate modulation. This is mainly due to a degradation of the PZT stack that occurs because of the decreased piezoelectric constant at lower temperatures [28]. The decreased effectiveness in flow modulation is also apparent in decreased hysteresis.…”

Section: Discussionmentioning

confidence: 98%

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A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Park

Evans

Rasmussen

et al. 2009

J. Microelectromech. Syst.

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This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient. The valve consists of a micromachined die fabricated from a silicon-on-insulator wafer, a glass wafer, a commercially available piezoelectric stack actuator, and Macor ceramic encapsulation that has overall dimensions of 1.5 × 1.5 × 1.1 cm 3 . A piezoresistive pressure sensor and a thin-film Pt resistance temperature detector are integrated on the silicon die. The assembly process allows the implementation of normally open, partially open, and normally closed valves. At room temperature, gas flow modulation from 200 to 0 mL/min is achieved from 0-to 40-V actuation. Flow modulation at various temperatures from room temperature to 205 K is also reported. The pressure sensor has sensitivity of 356 ppm/kPa at room temperature, with temperature coefficient of sensitivity of −6507 ppm/K. The temperature sensor has sensitivity of 0.29%/K. The valve and the sensors are tested across a wide range of temperatures, and the effect of temperature on performance is discussed.[ 2008-0253]Index Terms-Cooling systems, cryogenic, microelectromechanical systems (MEMS), piezoelectric, piezoresistive pressure sensor, resistance temperature detector (RTD).

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Section: Discussionmentioning

confidence: 98%

“…A small displacement provided by piezoelectric actuation is further reduced at cryogenic temperatures [28]. This limited displacement is compensated by perimeter augmentation of the valve flow passage.…”

Section: Device Structure and Operationmentioning

confidence: 99%

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Park

Evans

Rasmussen

et al. 2009

J. Microelectromech. Syst.

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“…Germany. To determine the range of the finestage, we extrapolated data from reference [22] for the actuator constant from 20 K to 0 K. …”

Section: Methodsmentioning

confidence: 99%

Spin-mediated dissipation and frequency shifts of a cantilever at milliKelvin temperatures

et al. 2015

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We measure the dissipation and frequency shift of a magnetically coupled cantilever in the vicinity of a silicon chip, down to 25 mK. The dissipation and frequency shift originates from the interaction with the unpaired electrons, associated with the dangling bonds in the native oxide layer of the silicon, which form a two-dimensional system of electron spins. We approach the sample with a 3.43 μm-diameter magnetic particle attached to an ultrasoft cantilever and measure the frequency shift and quality factor as a function of temperature and the distance. Using a recent theoretical analysis [J. M. de Voogd et al., arXiv:1508.07972] of the dynamics of a system consisting of a spin and a magnetic resonator, we are able to fit the data and extract the relaxation time T 1 = 0.39 ± 0.08 ms and spin density σ = 0.14 ± 0.01 spins per nm 2 . Our analysis shows that at temperatures 500 mK magnetic dissipation is an important source of noncontact friction.

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“…The stress was simulated by thermal-structural analysis using the FEM analysis. In this simulation, the non-linear characteristics of materials at an ultralow temperature were used (10)- (13) . These characteristics were the CTE of all the materials and Yang's moduli of all metals.…”

Section: Simulation Of Thermal Stress Of Bltmentioning

confidence: 99%

Bolt-Clamped Langevin-Type Transducer for Ultrasonic Motor used at Ultralow Temperature

Yamaguchi

Kanda

Suzumori

2012

JAMDSM

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Ultralow temperature environments are important for advanced scientific research areas, for example, chemical analysis technology. Some devices need to be operated in an ultralow temperature environment. However, actuators used in such an environment have low output power. As a result, some applications in an ultralow temperature environment have limited functions. This research aims to achieve a piezoelectric actuator having high output power at an ultralow temperature. A bolt-clamped Langevin-type transducer for an ultrasonic motor used in an ultralow temperature environment is proposed. The piezoelectric materials used in the transducer are affected by thermal stress when the temperature decreases from room temperature to an ultralow one. As a result, the materials break down or the performance of the transducer decreases. Thermal stress was simulated with the finite element method using some non-linear properties of materials in the transducer. The influence of the stress was evaluated by driving a transducer at an ultralow temperature obtained by using helium gas. An ultrasonic motor for use at an ultralow temperature was fabricated and evaluated. The maximum diameter and the height of the motor are 22 and 30.5 mm, respectively. The motor was successfully rotated at an ultralow temperature.

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Measurements of the Material Properties of a Laminated Piezoelectric Stack at Cryogenic Temperatures

Cited by 24 publications

References 1 publication

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Spin-mediated dissipation and frequency shifts of a cantilever at milliKelvin temperatures

Bolt-Clamped Langevin-Type Transducer for Ultrasonic Motor used at Ultralow Temperature

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