Total factor productivity (TFP) serves as a crucial indicator of high-quality development, showcasing a region’s utilization of technological advancements and innovative strategies to enhance production efficiency. With China’s regions experiencing varying levels of development, the paths to high-quality development in NHTZs also exhibit significant disparities. Analyzing data from 88 NHTZs between 2011 and 2018, this research aims to explore differences in TFP growth models and the mechanisms influencing these models. Employing stochastic frontier analysis (SFA) and the Tobit model, the study identifies three TFP growth models: technology-led, multi-efficiency improvement, and scale efficiency compensation. While factors such as capital accumulation, overseas market participation, and patent output moderately hinder TFP growth, innovation platforms, R&D investment, and overseas talent acquisition significantly contribute to TFP enhancement. Distinguishing itself from existing TFP studies, this paper focuses on NHTZs, highlighting their role in regional high-tech industry development. It introduces three TFP growth models and their characteristics while also uncovering influencing factors for each model. This research offers valuable insights into regional disparities in high-quality development and contributes to understanding TFP growth dynamics in NHTZs.