“…Furthermore, 4D-STEM can be more dose-efficient than conventional STEM methods, and therefore can be used to study beam-sensitive targets (e.g., biological samples) (Pennycook et al, 2015(Pennycook et al, , 2019Yang et al, 2015aYang et al, , 2015bYang et al, , 2016Pelz et al, 2017;Zhou et al, 2020). Among various 4D-STEM techniques, atom-resolved in-focus 4D-STEM (Nguyen et al, 2016;Müller-Caspary et al, 2019;Heimes et al, 2020) has been particularly popular, since having a Z-contrast STEM signal simultaneously available usually helps to effectively extract information from the 4D-STEM dataset (Yang et al, 2016;Wen et al, 2019). Successful implementation of a 4D-STEM experiment requires establishing an accurate geometrical relationship (e.g., scaling, rotation, shearing) between the scanning positions on the sample plane and the diffraction patterns collected on the camera.…”