Mechanical and elastic properties of fine-grained polycrystalline scandia and erbia as determined by indentation techniques

Yeheskel, O.; Albayrak, Ismail C.; Anasori, Babak; Barsoum, Michel W.

doi:10.1016/j.jeurceramsoc.2011.03.030

Cited by 12 publications

(6 citation statements)

References 47 publications

(100 reference statements)

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“…For comparison, the average measured isothermal bulk modulus of Sc 2 O 3 reported herein is 188 ± 10 GPa . The brief overview of the mechanical and elastic properties of Sc 2 O 3 was done previously . The obtained in the present research hardness of Sc 2 O 3 films are higher when compared with pure hafnium oxide films (monoclinic phase, H = 18 GPa), and comparable with hafnium oxide of high‐temperature phases stabilized by nitrogen (tetragonal/cubic, H = 20 GPa) .…”

Section: Resultssupporting

confidence: 53%

Effect of Annealing on Optical, Mechanical, Electrical Properties and Structure of Scandium Oxide Films

Belosludtsev

Yakimov

Mroczynski

et al. 2019

Physica Status Solidi (a)

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Scandium oxide (Sc2O3) films are deposited by reactive magnetron sputtering. The effects of annealing on the structure, as well as the optical, mechanical, and electrical properties are investigated. The detailed investigation of the mechanical properties and high load indentation resistance in combination with electrical and optical properties is done. It is noted that after annealing at 300 °C, the extinction coefficient and refractive index slightly decreases. It is reported that before and after annealing, Sc2O3 films with cubic phase remains very hard (19 GPa) and resistant to high load (up to 1N) indentation test. Moreover, the effects of post‐deposition annealing on electrical characteristics of metal–insulator–semiconductor (MIS) structures with Sc2O3 gate dielectric layer are investigated. After the annealing procedure, the MIS structures are characterized by lower frequency dispersion, lower flat‐band voltage value, and lower effective charge density. The insulating properties remain at similar level when compared with the devices fabricated with as‐deposited dielectric material. The findings that are in this study make the investigated Sc2O3 films a promising material for various applications in optics, optoelectronic, and electronic semiconductor structures.

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Section: Resultssupporting

confidence: 53%

Effect of Annealing on Optical, Mechanical, Electrical Properties and Structure of Scandium Oxide Films

Belosludtsev

Yakimov

Mroczynski

et al. 2019

Physica Status Solidi (a)

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“…The fracture toughness, K IC , of the hot-pressed LLTO samples was determined using the indentation technique [17][18][19][20][21][22][23][24][25][26]. A typical pyramid-shaped Vickers indenter was employed with a load of 0.3 kg for 15 s to induce cracks that extended from the indent corners, from which the crack sizes were determined optically.…”

Section: Fracture Toughnessmentioning

confidence: 99%

“…The H/G values for LLTO, LLZO, and LATP were similar, suggesting that they all have the same type of dominant bonding: Covalent bonding. Table 2 lists the fracture toughness values of LLTO-SG and LLTO-SS using different equations to determine K IC from the indentation crack lengths [17][18][19][20][21][22][23][24][25][26]. The long straight cracks are indicative of a brittle material [25][26][27].…”

Section: Hardness and Bondingmentioning

confidence: 99%

Mechanical properties of the solid Li-ion conducting electrolyte: Li0.33La0.57TiO3

et al. 2012

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Li 0.33 La 0.57 TiO 3 (LLTO) is a potential Li-ion conducting membrane for use in aqueous Li-air batteries. To be in this configuration its mechanical properties must be determined. Dense LLTO was prepared using a solidstate (SS) or sol-gel (SG) procedure and was hot-pressed to yield a high relative density material ([95 %). Young's modulus, hardness, and fracture toughness of the LLTO-SS and sol-gel LLTO-SG materials was determined and compared to other solid Li-ion conducting electrolytes. The Young's modulus for LLTO-SG and LLTO-SS was 186 ± 4 and 200 ± 3 GPa, respectively. The Vickers hardness of LLTO-SG and LLTO-SS was 9.7 ± 0.7 and 9.2 ± 0.2 GPa, respectively. The fracture toughness, K IC , of both LLTO-SG and LLTO-SS was *1 MPa m 1/2 ; the fracture toughness of LLTO-SG was slightly higher than that of LLTO-SS. Both LLTO-SG and LLTO-SS have a Young's modulus and hardness greater than the other possible solid Li-ion conducting membranes

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“…Although Vb had little affected the coating crystalline structure, it did affect the coating hardness. The bulk hardness of Er2O3 is about 7 GPa [18], which is about the hardness of coatings deposited with Vb= -20V. However, when Vb was -40 V, HK varied with P, with the highest hardness, HK= 10 GPa at the lowest pressure, P= 0.40 Pa and the lowest hardness of HK= 4 GPa at the highest pressure, P= 0.93 Pa.…”

Section: Discussionmentioning

confidence: 85%

Thermal Stability of Filtered Vacuum Arc Deposited Er2O3 Coatings

Zukerman¹,

Goldenberg²,

Zhitomirsky³

et al. 2015

J. Coat. Sci. Technol.

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Erbium oxide (Er2O3) coatings were deposited using filtered vacuum arc deposition (FVAD) and their structure and thermal stability were studied as a function of fabrication parameters. The coatings were deposited on silicon wafer and tantalum substrates with an arc current of 50 A and a deposition rate of 1.6 ± 0.4 nm/s. The arc was sustained on truncated cone Er cathodes. The influence of oxygen pressure (P= 0.40-0.93 Pa), bias voltage (Vb= -20, -40 or grounded) and substrate temperature (room temperature (RT) or 673K) on film properties was studied before and after post deposition annealing (1273K for 1 hour, at P~ 1.33 Pa). The coatings were characterized using X-ray diffraction (XRD), optical microscopy, scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and Knoop Hardness.Optical microscope images indicated that the coatings had very low macroparticle concentration on their surface. The macroparticle diameters were less than 2.5 μm. The coatings were composed of only Er2O3 without any metallic phase under all deposition parameters tested. The coatings deposited on RT substrates were XRD amorphous and had a featureless cross-section microstructure. However, the coatings deposited on 673K heated substrates had a C-Er2O3 structure with (222) preferred orientation and weak columnar microstructure. The coating hardness varied with deposition pressure and substrate bias, and reached a maximum value of 10 GPa at P = 0.4 Pa and Vb = -40 V. The post-deposition annealing caused crystallization, and the coatings hardness dropped to 4 GPa with thermal treatment. However, after postdeposition annealing, no peeling or cracking appeared at the coating surface or the interface with the substrate.

show abstract

Mechanical and elastic properties of fine-grained polycrystalline scandia and erbia as determined by indentation techniques

Cited by 12 publications

References 47 publications

Effect of Annealing on Optical, Mechanical, Electrical Properties and Structure of Scandium Oxide Films

Effect of Annealing on Optical, Mechanical, Electrical Properties and Structure of Scandium Oxide Films

Mechanical properties of the solid Li-ion conducting electrolyte: Li0.33La0.57TiO3

Thermal Stability of Filtered Vacuum Arc Deposited Er2O3 Coatings

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