Silicon oxycarbide is a versatile material system that is attractive for many applications because of its ability to tune
properties such as chemical compatibility, refractive index, electrical conductivity, and optical band gap through changes in
composition. One particularly intriguing application lies in the production of biocompatible coatings with good mechanical
properties. In this paper, we report on the wide range of mechanical and tribological property values exhibited by silicon
oxycarbide thin films deposited by reactive radio frequency magnetron sputtering. Through a change in oxygen partial pressure
in the sputtering plasma, the composition of the films was controlled to produce relatively pure SiO2, carbon-doped SiC, and compositions between these limits. Hardness values were 8–20 GPa over this range and the elastic modulus was measured to be
between 60 and 220 GPa. We call attention to the fit of the mechanical data to a simple additive bond-mixture model for
property prediction. Tribological parameters were measured using a ball-on-disk apparatus and the samples exhibited the same
general trends for friction coefficient and wear rate. One film is shown to produce variable low friction behavior and low wear
rate, which suggests a solid-state self-lubrication process because of heterogeneity on the nanometer scale