2019
DOI: 10.1016/j.surfcoat.2019.06.008
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Mechanical and tribological properties of Hf1-xMoxNy thin films as a function of Mo contents

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Cited by 22 publications
(7 citation statements)
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“…To prolong the lifetime of these hard coatings and enhance their mechanical characteristics are essential to the development of nitride coatings, adding a second element to form a ternary TMN coating for further performance improvement is frequently proposed. Common dopping elements include transition metals, such as Cu, Ag, Hf, or W [10][11][12][13][14], and group I3-I4 species, such as B, Si, and Al [15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
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“…To prolong the lifetime of these hard coatings and enhance their mechanical characteristics are essential to the development of nitride coatings, adding a second element to form a ternary TMN coating for further performance improvement is frequently proposed. Common dopping elements include transition metals, such as Cu, Ag, Hf, or W [10][11][12][13][14], and group I3-I4 species, such as B, Si, and Al [15][16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…As compared with the binary nitrides, such as TiN, CrN, and TaN coatings, the investigation of MoN and HfN coatings are relatively limited. The MoN coating has the advantages of low friction coefficient, excellent chemical stability, and self-lubrication [7,10,20,21].…”
Section: Introductionmentioning
confidence: 99%
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“…Coating techniques have been developed to protect the surfaces of materials and to enhance their chemical and mechanical properties in various fields. Metals, 1,2 metal oxides, [3][4][5] and alloys [6][7][8] have been used for various applications, such as corrosion protection, [9][10][11] surface hardening, [12][13][14] enhancement of wear characteristics, 15,16 and decorative exteriors. 17 To deposit thin films, various coating techniques such as physical vapor deposition (PVD), 18,19 chemical vapor deposition (CVD), 20,21 atomic layer deposition (ALD), [22][23][24] and electrochemical deposition (ED) 25,26 are widely used.…”
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confidence: 99%