Abstract:Cr-Si-O-N coatings with different oxygen contents were deposited by multi-arc ion plating, where various O 2 /(N 2 + O 2 ) reactive gas rates were adopted. The XRD and XPS results showed that the CrN crystals disappeared with the increasing of the oxygen flux ratio to 10 at.%. The microhardness of all the Cr-Si-O-N coatings was approximately 2000 Hv 0.05 , which were dramatically plummeted compared to that of the Cr-Si-N coatings (≈3300 Hv 0.05 ). The Cr-Si-O-N coatings were annealed under 800 • C and 1200 • C in the air atmosphere for 2 h to study the high-temperature oxidation resistance of the coatings. Meanwhile, Cr-Si-O-N coatings with different O 2 /(N 2 + O 2 ) rates were also used to carry out the corrosion resistance testing using the electrochemical working station in 3.5% NaCl solution under free air condition at room temperature. The results indicated that the coatings containing oxygen were more vulnerable to the high-temperature destruction and more easily corroded in the NaCl electrolyte.