Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Berdova, Maria; Ylitalo, Tuomo; Kassamakov, Ivan; Heino, J.; Törmä, Pekka; Kilpi, Lauri; Ronkainen, Helena; Koskinen, Jari; Hæggström, Edward; Franssila, Sami

doi:10.1016/j.actamat.2013.11.024

Cited by 50 publications

(47 citation statements)

References 47 publications

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“…The TiO2 fraction did not influence the residual stress of the nanolaminate (grown at 200 °C) as long as sublayers remained amorphous. Our results are in line with those of Berdova et al 49 for films grown at 220 °C (50% of TiO2, 4 nm bilayer thickness, residual stress ~450 MPa). And agree with the results of Behrendt et al 48 for ATO films grown at 100 °C (50% of TiO2, 2 nm bilayer thickness, residual stress ~400 MPa) where residual stress was reported to be independent of the film thickness.…”

Section: Residual Stresssupporting

confidence: 82%

“…80 Our results are in line with literature for mixed oxide grown at 220 °C. 49 It is interesting also to compare our film stress results to earlier ATO nanolaminate film stress results. According to Maula et al 47 , the stress of TiO2 and Al2O3, grown at 285 °C on an unknown substrate, were 190 MPa (tensile) and -65 MPa (compressive).…”

Section: Residual Stressmentioning

confidence: 97%

“…The idea of residual stress adjustment has been introduced in Al2O3 / TiO2 multilayer materials already in 2005 47 and since then scattered residual stress data has been published, for example as a function of nanolaminate thickness for films grown at 100 °C, 48 and for nanolaminates and mixed oxides grown at 220 °C. 49 Mechanical properties such as elastic modulus and hardness has been studied as a function of bilayer thickness using nanoindentation for films grown at 200 °C 39 and elastic modulus by bulge and shaft loading test. 49 The Al2O3 / TiO2 nanolaminate adhesion has been studied by indentation on stainless steel substrate, 41,40 and for reference ALD Al2O3 and ALD TiO2 materials on silicon 50 and on polymeric substrate.…”

Section: Fig 1 (Color Online)mentioning

confidence: 99%

“…49 Mechanical properties such as elastic modulus and hardness has been studied as a function of bilayer thickness using nanoindentation for films grown at 200 °C 39 and elastic modulus by bulge and shaft loading test. 49 The Al2O3 / TiO2 nanolaminate adhesion has been studied by indentation on stainless steel substrate, 41,40 and for reference ALD Al2O3 and ALD TiO2 materials on silicon 50 and on polymeric substrate. 51 Since there is no systematic data on residual stress, adhesion and mechanical properties of Al2O3 / TiO2…”

Section: Fig 1 (Color Online)mentioning

confidence: 99%

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Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Ylivaara¹,

Kilpi²,

Liu

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic process enable the growth of conformal thin films with precise thickness control and sharp interfaces. A multilayered thin film, which is nanolaminate, can be grown using ALD with tuneable electrical and optical properties to be exploited, for example, in the microelectromechanical systems. In this work, the tunability of the residual stress, adhesion, and mechanical properties of the ALD nanolaminates composed of aluminum oxide (Al2O3) and titanium dioxide (TiO2) films on silicon were explored as a function of growth temperature (110–300 °C), film thickness (20–300 nm), bilayer thickness (0.1–100 nm), and TiO2 content (0%–100%). Al2O3 was grown from Me3Al and H2O, and TiO2 from TiCl4 and H2O. According to wafer curvature measurements, Al2O3/TiO2 nanolaminates were under tensile stress; bilayer thickness and growth temperature were the major parameters affecting the stress; the residual stress decreased with increasing bilayer thickness and ALD temperature. Hardness increased with increasing ALD temperature and decreased with increasing TiO2 fraction. Contact modulus remained approximately stable. The adhesion of the nanolaminate film was good on silicon.

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Section: Residual Stresssupporting

confidence: 82%

Section: Residual Stressmentioning

confidence: 97%

Section: Fig 1 (Color Online)mentioning

confidence: 99%

Section: Fig 1 (Color Online)mentioning

confidence: 99%

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Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Ylivaara¹,

Kilpi²,

Liu

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

Self Cite

View full text Add to dashboard Cite

show abstract

“…The solid unit cell simulations were performed using C3D10 10-node quadratic tetrahedral elements, and the hollow simulations used S3R 3-node shell elements to represent the discretized unit cells. An isotropic linear elastic material model was used for both solid and hollow structure simulations, and stiffnesses for the constituent polymer and Al 2 O 3 were obtained from literature [23,40]. Solid unit cell simulations had between 25,000 -250,000 elements and hollow unit cell simulations had between 25,000 -100,000 elements; the exact number of elements varied depending on the unit cell and structural parameters used.…”

Section: Finite Element Modelingmentioning

confidence: 99%

Reexamining the mechanical property space of three-dimensional lattice architectures

et al. 2017

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Lightweight materials that are simultaneously strong and stiff are desirable for a range of applications from transportation to energy storage to defense. Micro-and nanolattices represent some of the lightest fabricated materials to date, but studies of their mechanical properties have produced inconsistent results that are not well captured by existing lattice models. We performed systematic nanomechanical experiments on four distinct geometries of solid polymer and hollow ceramic (Al 2 O 3 ) nanolattices. All samples tested had a nearly identical scaling of strength (ߪ ௬ ) and Young's modulus ‫)ܧ(‬ with relative density (ߩ̅ ), ranging from ߪ ௬ ∝ ߩ̅ ଵ.ସହ to ߩ̅ ଵ.ଽଶ and ‫ܧ‬ ∝ ߩ̅ ଵ.ସଵ to ߩ̅ ଵ.଼ଷ , revealing that changing topology alone does not necessarily have a significant impact on nanolattice mechanical properties. Finite element analysis was performed on solid and hollow lattices with structural parameters beyond those realized experimentally, enabling the identification of transition regimes where solid-beam lattices diverge from existing analytical theories and revealing the complex parameter space of hollow-beam lattices. We propose a simplified analytical model for solid-beam lattices that provides insight into the mechanisms behind their observed stiffness, and we investigate different hollow-beam lattice parameters that give rise to their aberrant properties. These experimental, computational and theoretical results uncover how architecture can be used to access unique lattice mechanical property spaces while demonstrating the practical limits of existing beam-based models in characterizing their behavior.

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The Impact of Size and Loading Direction on the Strength of Architected Lattice Materials

et al. 2016

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Lattice materials are strong yet light. Miniaturizing the pattern size to the micro‐scale allows exploiting mechanical size effects. So far, the impact of the lattice size on the strength has not been studied systematically and mechanical characterization has been focused on compression tests only. Here, the strength of polymer–alumina core–shell composite microlattices with different pattern sizes is investigated in compression and tension. The compressive strength increases by a factor of two when the lattice size is scaled down by 50%. With tensile strengths of up to 27 MPa at 0.37 gcm−3, the microlattices outperform all technical foams and most monolithic ceramics. Isotropic strength under tension and compression is found when thickness‐dependent notch effects in the alumina shells are considered.

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Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Cited by 50 publications

References 47 publications

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Reexamining the mechanical property space of three-dimensional lattice architectures

The Impact of Size and Loading Direction on the Strength of Architected Lattice Materials

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