Mechanical behavior of ultrathin microcantilever

Yang, Jinling; Ono, Takahito; Esashi, Masayoshi

doi:10.1016/s0924-4247(99)00319-2

Cited by 129 publications

(75 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The rather low Q factor observed for the cantilevers are due to the metal coating, 13 and similar uncoated cantilevers have Q factors that are 10 times higher. The increasing Q factor has previously been observed 14,15 and is likely due to the smaller centre of mass movement and smaller radiation at the support for increasing bending modes. 16 In conclusion, a mass responsivity of approximately 5 fg/ Hz has been observed for a micrometer sized cantilever when operating the cantilever in the fourth mode.…”

Section: * ͑1͒supporting

confidence: 56%

Enhanced functionality of cantilever based mass sensors using higher modes

Dohn

Sandberg

Svendsen

et al. 2005

Applied Physics Letters

260

171

View full text Add to dashboard Cite

By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.

show abstract

Section: * ͑1͒supporting

confidence: 56%

Enhanced functionality of cantilever based mass sensors using higher modes

Dohn

Sandberg

Svendsen

et al. 2005

Applied Physics Letters

260

171

View full text Add to dashboard Cite

show abstract

“…The ultimate sensitivity of the sensor is determined by the device's quality factor (Q) and modulus of elasticity. 8,9 For the purpose of this paper, only resonator application will be discussed.One challenge in manufacturing BAR devices is the achievement of a high-quality film. The piezoelectric materials currently being utilized are typically grown via sputter deposition.…”

mentioning

confidence: 99%

Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

et al. 2006

View full text Add to dashboard Cite

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt−Leedom−Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.Bulk acoustic resonators (BAR) have shown a great deal of promise for applications as high-performance frequency control devices in wireless networks such as cell phones, navigation systems, satellite communication, and other forms of data communication. These devices consist of a thin piezoelectric film sandwiched between two electrodes. An RF signal applied through the thickness of the film produces mechanical motion, and fundamental resonance occurs when the film thickness equals λ/2 the input signal. At the resonant frequency, the impedance of the device drops, whereas at anti-resonance, the impedance reaches a maximum. This behavior makes the resonator useful as an electronic filter. Subsystem miniaturization in filter applications is pushing toward on-chip components with low power consumption instead of the bulky off-chip quartz crystal and surface acoustic wave (SAW) devices currently being used. 1,2 The most promising candidates for replacement are the solidly mounted resonator (SMR), 3 thin-film bulk acoustic resonator (FBAR), 4 and clamped-clamped beam resonator (beam resonator). 5,6 In addition to applications in electronic circuits, BAR devices are immediately transferable as mass sensors. Saurbrey treated a change in mass applied to a resonator as a change in mass to the resonator itself. 7 Since the resonant frequency of a BAR device is defined by its material properties and geometry, applying a voltage, mass, or temperature change to the resonator results in a shift of its characteristic frequency. The ultimate sensitivity of the sensor is determined by the device's quality factor (Q) and modulus of elasticity. 8,9 For the purpose of this paper, only resonator application will be discussed.One challenge in manufacturing BAR devices is the achievement of a high-quality film. The piezoelectric materials currently being utilized are typically grown via sputter deposition. The results of this are low-quality films made up of oriented grains with a high concentration of defects. 10 ZnO is particularly sensitive to temperature, acids, bases, and even water. As a result, other processes like cleaning, etching, metal layer patterning, passivation, reactive ion etching, and the stripping of photoresist all degrade the quality of the ZnO. 11 High-quality single crystals are desirable; however, microfabrication techniques result in poor material properties.The bottom-up approach of nanotechnology has yielded many high-quality, single-crystal, and defect-free structures such as nanobelts. 12 Piezoele...

show abstract

“…Among the previous works that have reported on the fabrication of ultrathin cantilever beams, virtually all of them employ a SOI wafer as the starting material. 12,13 The fabrication method used in this study has the advantage of fabricating all-silicon structures without any oxide layer being present under the silicon anchor of the cantilever beam. This eliminates any mismatch in material properties between the silicon and silicon dioxide material that exists when using SOI as the starting material.…”

Section: A Cantilever Beam Fabrication and Mechanical Characterizationmentioning

confidence: 99%

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Gupta¹,

Akin²,

Bashir³

2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

118

View full text Add to dashboard Cite

This article describes a surface micromachined cantilever beam-based resonator for biological sensing applications. The study used a novel microfabrication technique of merged epitaxial lateral overgrowth (MELO) and chemical mechanical polishing (CMP) to fabricate thin, low stress, single-crystal silicon cantilever beams. The vibration spectra of the cantilever beams, excited by thermal and ambient noise, was measured in air using a Dimension 3100 Series scanning probe microscope (SPM), and in certain cases, a Polytec MSV300 laser Doppler vibrometer. The sensors were used to detect the mass of Listeria innocua bacteria by applying increasing concentration of bacteria suspension on the same cantilever beams and measuring the resonant frequency changes in air. Cantilever beams were also used to detect the mass of proteins such as Bovine Serum Albumin (BSA) and antibodies for Listeria that were attached to the cantilever's surfaces by physical adsorption; following which they were used to capture and detect the mass of the bacterial cells on the functionalized cantilever beam surfaces'. The effects of critical point drying of the proteins were evaluated and the results indicate that the functionality of the antibodies was not reduced once rehydrated after critical point drying. The developed biosensor is capable of rapid and ultrasensitive detection of bacteria and promises significant potential for the enhancement of microbiological research and diagnostics.

show abstract

Mechanical behavior of ultrathin microcantilever

Cited by 129 publications

References 9 publications

Enhanced functionality of cantilever based mass sensors using higher modes

Enhanced functionality of cantilever based mass sensors using higher modes

Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators

Contact Info

Product

Resources

About