Mechanical characteristics of imprinted nanostructures fabricated with a poly(dimethylsiloxane) mold

Abstract

Articles you may be interested inDensity measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold J. Vac. Sci. Technol. B 30, 06FB06 (2012); 10.1116/1.4758776Thermal imprinting on quartz fiber using glasslike carbon mold Nanoscale imprinted pillars were fabricated with three resin systems and characterized by measuring the spring constant using a scanning probe microscopy cantilever manipulated with a three-axis actuator. The functional dependence of the spring constant on the height and diameter of the pillar was then used to determine the Young's modulus. Nanoindentation was used to determine the Young's modulus of the base film. Before high temperature annealing, the Young's modulus of the imprinted pillar was nearly the same as that of film. After the annealing, the Young's modulus of the imprinted pillar was lower than that of the film.

Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

“…If the diameter of the imprinted pillars is fixed, Eq. (11) becomes log f 0 ðLÞ ¼ À2 log L þ C; (12) and log f 0 is proportional to À2 log L. The experimental results were in good agreement with the theoretical value of À2. The density of the imprinted pillars was calculated from the resonant frequency using Eq.…”

“…Previously, we determined Young's modulus of imprinted pillars by measuring the spring constant using an Si cantilever manipulated with a three-axis actuator. 12 The Si cantilever was fixed, and an Si substrate with imprinted pillar was placed opposite to it. The tip of the imprinted pillar was moved to deflect the Si cantilever, and the spring constant was evaluated from the resulting deflections.…”

Characterization of the mechanical behavior of SU-8 at microscale by viscoelastic analysis

“…They also measured the friction coefficient, yielding a value of 0.19. Numerous results have been reported for the Young's modulus of SU-8 [14][15][16][17][18][19][20][21][22][23][24][25][26]. The reported Young's modulus varies from 0.9 to 7.4 GPa.…”

Three-dimensional hydrogen silsesquioxane nanostructure fabrication by reversal room-temperature nanoimprint using poly(dimethylsiloxane) mold

“…The 3D structure did not change after the annealing treatment, which indicates that the 3D HSQ nanostructure can be transformed to SiO x by annealing at 1000 °C, because it is reported that HSQ is transformed SiO x by annealing at over 600 °C. 32)…”

“…By combining RT-NIL using HSQ resin and reversal nanoimprinting, the inorganic SiO x 3D nanostructure is expected to be achieved, because HSQ becomes SiO x after annealing at above 600 °C. 32) In this work, for the first time, reversal nanoimprinting by RT-NIL with HSQ resin has been studied to fabricate 3D inorganic SiO x structures and the interface adhesion between the higher and lower layers and the thermal durability of 3D nanostructures were evaluated.…”