Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold

Abstract

The authors report density measurements of a pillar structure that was fabricated via nanoimprinting using a poly(dimethylsiloxane) mold. The imprinted pillars were fabricated using two types of resin, SU-8 and hydrogen silsesquioxane, and were characterized by measuring the spring constant using a scanning probe microscopy cantilever, which was manipulated with a three-axis actuator. The spring constant determined Young's modulus of the imprinted pillars. The authors measured the resonant frequency using the alternating current electrostatic force. Using the results for Young's modulus and the resonant frequency, they determined the density of the pillar structure fabricated via nanoimprinting.