2015
DOI: 10.1016/j.tsf.2015.08.017
|View full text |Cite
|
Sign up to set email alerts
|

Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

3
15
0
4

Year Published

2018
2018
2024
2024

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 58 publications
(22 citation statements)
references
References 44 publications
3
15
0
4
Order By: Relevance
“…The presence of oxygen was attributed to the surface oxidation. This process was also observed by Batory et al [32]. The confirmation of this fact was by the presence of the Si-O atomic groups in the IR spectra as well as the highest range of surface hardness for obtained Si-DLC layers (the tested PE_4 sample, vide infra Figure 3 and see Section 3.4).…”
Section: Morphological Analysissupporting
confidence: 79%
“…The presence of oxygen was attributed to the surface oxidation. This process was also observed by Batory et al [32]. The confirmation of this fact was by the presence of the Si-O atomic groups in the IR spectra as well as the highest range of surface hardness for obtained Si-DLC layers (the tested PE_4 sample, vide infra Figure 3 and see Section 3.4).…”
Section: Morphological Analysissupporting
confidence: 79%
“…The hardness decreased and the transmittance increased as the HMDSO flow rate increased. Similar results were also reported by Batory et al [40]. Figure 7 presents the XPS relative atomic contents of C, Si, and O.…”
Section: The Transparent Very Thin Sio X :Dlc Filmssupporting
confidence: 87%
“…The peak at approximately 1,270 cm −1 corresponds to Si-(CH 3 ) x groups. [28] Two peaks at 1,375 and 1,456 cm −1 belong to CH 3 groups in PP. [29] The wide peak at 1,560-1,760 cm −1 corresponds to stretching vibrations of conjugated carbonyl (C O) bonds and is observed in the absorption spectra of SiO x -incorporated DLC coatings.…”
Section: F I G U R Ementioning
confidence: 99%