“…AlCrN films were oxidized to Al 2 O 3 and Cr 2 O 3 [6], or (Cr,Al) 2 O 3 [9], which suppressed oxygen diffusion. The addition of Si to the AlCrN films refines the grain [10,11], decreases crystallinity [11], increases hardness [12,13], and improves the resistance to wear [10] and oxidation [13][14][15]. AlCrSiN films have been deposited on cemented carbides [11,13,16], Si [11,12,15], and steel [10][11][12]17] by cathodic arc evaporation [11,16,17], cathodic arc ion plating [10], and magnetron sputtering [13,15].…”