2008
DOI: 10.1016/j.tsf.2008.06.050
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Mechanical properties and oxidation behaviour of (Al,Cr)N and (Al,Cr,Si)N coatings for cutting tools deposited by HPPMS

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Cited by 115 publications
(65 citation statements)
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“…Up to date HIPIMS has been used in the reactive mode to deposit a number of industrially-attractive coatings [14][15][16][17][18][19][20][21][22][23]. Despite the still growing number of publications dealing with characterizations of thin films prepared using this technique a basic parameter study revealing the nature of the reactive HIPIMS processing is missing.…”
Section: High Power Impulse Magnetron Sputtering (Hipims or Hppms) Ismentioning
confidence: 99%
“…Up to date HIPIMS has been used in the reactive mode to deposit a number of industrially-attractive coatings [14][15][16][17][18][19][20][21][22][23]. Despite the still growing number of publications dealing with characterizations of thin films prepared using this technique a basic parameter study revealing the nature of the reactive HIPIMS processing is missing.…”
Section: High Power Impulse Magnetron Sputtering (Hipims or Hppms) Ismentioning
confidence: 99%
“…AlCrN films were oxidized to Al 2 O 3 and Cr 2 O 3 [6], or (Cr,Al) 2 O 3 [9], which suppressed oxygen diffusion. The addition of Si to the AlCrN films refines the grain [10,11], decreases crystallinity [11], increases hardness [12,13], and improves the resistance to wear [10] and oxidation [13][14][15]. AlCrSiN films have been deposited on cemented carbides [11,13,16], Si [11,12,15], and steel [10][11][12]17] by cathodic arc evaporation [11,16,17], cathodic arc ion plating [10], and magnetron sputtering [13,15].…”
Section: Introductionmentioning
confidence: 99%
“…AlCrSiN films have been deposited on cemented carbides [11,13,16], Si [11,12,15], and steel [10][11][12]17] by cathodic arc evaporation [11,16,17], cathodic arc ion plating [10], and magnetron sputtering [13,15]. The high-temperature oxidation of AlCrSiN films in air results in the formation of thin, dense oxide layers consisting primarily of Cr 2 O 3 [17], (Cr 2 O 3 , Al 2 O 3 ) [14], and (Cr 2 O 3 , Cr 2 O 5 , Al 2 O 3 ) [13]. However, the corrosion behavior of AlCrSiN films in various corrosive environments needs be investigated for broad applications.…”
Section: Introductionmentioning
confidence: 99%
“…1,2) CrN-based coatings doped with various metallic elements (e.g. (Cr,Al)N 3,4) and CrSiN 5,6) ) are now being used to improve the properties of the cutting tools. Not only metals but also nonmetal elements were also added in the thin films.…”
Section: Introductionmentioning
confidence: 99%