Mechanical Property Evaluation of Electroplated High Aspect Ratio Microstructures

Stephens, Lyndon Scott; Kelly, Kevin W.; Meletis, Efstathios I.; Simhadri, S.

doi:10.1557/proc-518-173

Cited by 7 publications

(1 citation statement)

References 2 publications

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“…These previous efforts were only concerned with tensile or bending of beam specimens and have resulted in values for the yield strength, ultimate tensile strength, and Young's modulus, mainly of LIGA nickel. [17][18][19][20][21][22][23][24][25][26] However, there is very little agreement among these studies, more than likely due to problems arising from specimen handling, inadequate testing capabilities and/or differences in electroplating conditions used during fabrication.…”

Section: Introductionmentioning

confidence: 99%

Fracture toughness study on LIGA fabricated microstructures

2003

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One of the major difficulties faced by MEMS researchers today is the lack of data regarding properties of electroplated metals or alloys at micro-levels as those produced by the LIGA and the LIGA related process. These mechanical properties are not well known and they cannot be extrapolated from macro-scale data without experimental verification. This lack of technical information about physical properties at microscale has affected the consistency and reliability of batch-fabricated components and leads to very low rates of successful fabrication. Therefore, this material issue is of vital importance to the development of LIGA technology and to its industrial applications. The research work reported in this paper focuses on the development of a new capability based on design, fabrication, and testing of groups of UV-LIGA fabricated nickel microspecimens for the evaluation of fracture strength. The devised testing mechanism demonstrated compatibility with the fabricated samples and capability of performing the desired experimentation by generating resistance-to-fracture values of the nickel specimens. The average fracture strength value obtained, expressed with a 95% confidence interval, was 315 ± 54 Mpa. Further data acquisition, especially involving tensile specimen testing, and material analysis is needed to fully understand the implications of the information obtained.

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Section: Introductionmentioning

confidence: 99%

Fracture toughness study on LIGA fabricated microstructures

2003

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The influence of the electroplating parameters on the conditions of deposited nickel‐iron coatings

Hoffmȧnn

Bedner

Clemens

et al. 2008

Materialwissenschaft Werkst

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Several specific electroplating parameters are varied to develop a manufacturing process for nickel-iron coatings with low residual stresses and favourable structures and hardness values. Here, the produced coating conditions on the surface are characterised according to alloy compositions, microstructures, residual stresses, texture and microhardness as well as the elastic indentation modulus. The manufacture of the coatings was carried out in a laboratory electroplating plant. The process parameters are: electroplating in electrolytic baths with and without saccharin as an additive, with different iron content as well as with various current parameters. The results show significant influences of saccharin, as a bath additive, and of the pulse frequency during the reverse current pulse procedure on the coating conditions. Supplementary investigations are scheduled for determining the distributions of the conditions through the coating thickness. Similarly, micromechanical tests are planned. Process parameters with optimal conditions can then be selected from the determined process-condition property relation. This is to subsequently serve as the basis for improving the manufacture of micro gear-wheels. The micro gear-wheels are produced by electroforming using the direct LIGA process.

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