Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology

Du, Liqun; Liu, Yaping; Li, Chengbin

doi:10.1049/mnl.2011.0515

Cited by 7 publications

(4 citation statements)

References 18 publications

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“…However, the relatively large development margin allowed all the patterns to be developed cleanly. Even though the resist shows some swelling before removal during the development, unlike some resists (such as SU-8) [12], it did not deform nearby microstructures. with a resist width of 5 µm which is higher than the estimated AR of 14.5 for 85 µm thick resist.…”

Section: (A) Resist Characterizationmentioning

confidence: 91%

High-aspect-ratio photoresist processing for fabrication of high resolution and thick micro-windings

Anthony

Laforge

Casey

et al. 2016

J. Micromech. Microeng.

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Section: (A) Resist Characterizationmentioning

confidence: 91%

High-aspect-ratio photoresist processing for fabrication of high resolution and thick micro-windings

Anthony

Laforge

Casey

et al. 2016

J. Micromech. Microeng.

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“…To prepare high-precision graphene/Ni composite microparts, a high-precision SU-8 glue mold [37,38] was first ensured; functional patterns of the required microparts were made on the gold-plated silicon wafer. The photolithography process involves cleaning the silicon substrate, glue application and homogenization, prebaking, exposure, post-baking, development, and blow-drying.…”

Section: The Su-8 Lithographymentioning

confidence: 99%

Investigation of the corrosion resistance of graphene-nickel composite micro-parts

Suo

Wang

et al. 2022

Mater. Res. Express

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Nickel-based microparts possess a short lifetime owing to their rapid dissolution in corrosive environments. To mitigate this phenomenon, composite microparts of graphene/Ni were prepared using UV-LIGA technology; their corrosion behavior was examined in acid, alkali, and salt solutions as well as after subjecting them to heat-treatment processes. The microstructures were investigated with scanning electron microscopy (SEM), X-ray diffraction (XRD), electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM). Corrosion resistances were characterized through various electrochemical tests and compared with those of pure Ni microparts. The results demonstrate that the surface oxidation layer (i.e.,the protective layer) of the microparts was readily destroyed in NaCl and H2SO4 solutions without the formation of a passivation film; however, a passivation film was formed in the NaOH solution. The corrosion rates of graphene/Ni in NaCl, NaOH, and H2SO4 corrosion solutions were reduced by 73%, 22%, and 84%, respectively, relative to those of pure Ni microparts. This can be primarily attributed to the homogeneous dispersion of graphene in the Ni matrix, which refined the grain size, and the impermeability and chemical stability of graphene, which lengthened the diffusion path of the corrosive medium. In addition, heat treatment of the graphene/Ni microparts at 200 °C increased the corrosion resistance by a factor of nearly one with little change in microhardness, which can be attributed to the removal of internal stress and the increased proportion of CSL grain boundares. Corrosion occurred at the interface between nickel and graphene, lengthening the corrosion path.

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“…Such swelling behavior of SU8 is associated with soft baking and SU8 can absorb water and saturate in several tens of seconds, depending on the initial thickness [27]. Ultrasonic treatment for less than 15min can, however, increase SU-8 surface hydrophilicity and reduce SU8 swelling, leading to improved dimensional accuracy of electroplated counterparts [28]. Figure 11 shows trenches that were milled on an Al master using micromilling and the corresponding protruded features on the Ni tool.…”

Section: Ni Tool Insertmentioning

confidence: 99%

Manufacturing microstructured tool inserts for the production of polymeric microfluidic devices

Zhang

Srivastava

Kirwan

et al. 2015

J. Micromech. Microeng.

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Abstract:Tooling is critical in defining multi-scale patterns for mass production of polymeric microfluidic devices using the microinjection molding process. In the present work, fabrication of various microstructured tool inserts using stainless steel, nickel and Bulk Metallic Glasses (BMGs) is discussed based on die-sinking EDM (electrical discharge machining), electroforming, Focused Ion Beam milling and thermoplastic processes. Tool performance is evaluated in terms of surface roughness, hardness and tool life. Compared to stainless steel, nickel and BMGs are capable of integrating length scales from 10 0 to 10 -8 m and are good candidates for producing polymeric microfluidics. Selection of tool materials and manufacturing technologies should consider the end-user requirements of actual applications.

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Mechanism analysis of ultrasonic treatment on SU-8 swelling in UV-LIGA technology

Cited by 7 publications

References 18 publications

High-aspect-ratio photoresist processing for fabrication of high resolution and thick micro-windings

High-aspect-ratio photoresist processing for fabrication of high resolution and thick micro-windings

Investigation of the corrosion resistance of graphene-nickel composite micro-parts

Manufacturing microstructured tool inserts for the production of polymeric microfluidic devices

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