2002
DOI: 10.1063/1.1509083
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Mechanism of carrier transport in aluminum-doped zinc oxide

Abstract: The conduction mechanism in aluminum-doped zinc oxide has been studied. Structural investigation shows that crystallographic orientation as well as grain boundary scattering can be neglected. Based on the analysis of the Hall mobility, it has been found that scattering at neutral and ionized impurities dominates the mobility. Further improvement in the mobility can be achieved by lowering the density of neutral impurities through careful control of the film processing parameters.

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Cited by 59 publications
(22 citation statements)
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“…26,27 The experimental values were found to be about one order of magnitude less than the theoretical ones which was attributed to additional scattering at neutral centers. We suppose that the reason is again a pronounced microstructure obtained by segregation at the firing temperature ͑up to 650°C).…”
Section: Electrical Conductivitymentioning
confidence: 94%
“…26,27 The experimental values were found to be about one order of magnitude less than the theoretical ones which was attributed to additional scattering at neutral centers. We suppose that the reason is again a pronounced microstructure obtained by segregation at the firing temperature ͑up to 650°C).…”
Section: Electrical Conductivitymentioning
confidence: 94%
“…where s À1 ig is the sum of the individual frequencies due to each scattering mechanisms in the grain bulk, including ionized impurity scattering, neutral impurity scattering, and lattice vibration scattering, [41][42][43][44] and s À1 GB is the scattering frequency at the GBs. In the AZO films with high N in this work, i.e., high degeneracy, only a narrow range of energy around the Fermi level is of interest.…”
Section: F Contribution Of Gb Scattering To Carrier Transportmentioning
confidence: 99%
“…Nevertheless, the mobility deduced for this sample is ∼1.04 cm 2 /V-s, i.e., of the same order as reported earlier (0.1-12.7 cm 2 /Vs) for 0.2-3 at% Al-ZnO thin films. 35 Obviously, about 2.4% of aluminum atoms seem to contribute to electron density while the rest create Zn 2+ vacancies, fill traps, form colour centres at anion vacancies, and/ or segregate as Al 2 O 3 along the grain boundaries. 16 The conductivity of ZnO thin films can be understood on the basis of Zn/O atomic ratio equal to, less or more than unity.…”
Section: Electrical Propertiesmentioning
confidence: 99%