2007
DOI: 10.1002/pssc.200673717
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Mechanism of radiation‐induced defects in SiO2: The role of hydrogen

Abstract: Hydrogen related defects in anhydrous "dry", hydrated "wet" and hydrogen implanted amorphous silicon dioxide (a-SiO 2 ) layers are investigated using cathodoluminescence (CL) technique in a wave length range 200-800 nm at specimen temperatures between room and liquid nitrogen temperature. Particular defect centers have been identified including the non-bridging oxygen hole center (NBOHC) associated with the red luminescence at 650 nm (1.9 eV) and the oxygen deficient centers (ODCs) with the blue (460 nm; 2.7 e… Show more

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Cited by 12 publications
(4 citation statements)
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“…After bombardment, photoluminescence occurs in the yellow-orange region of the spectrum. Salh and Fitting [15] consider unbridged oxygen to be responsible for luminescence in the region of ∼650 nm. However, we believe that in this region, the contribution of Si precipitates of various sizes and shapes is more important [16,17].…”
Section: Discussion Of the Resultsmentioning
confidence: 99%
“…After bombardment, photoluminescence occurs in the yellow-orange region of the spectrum. Salh and Fitting [15] consider unbridged oxygen to be responsible for luminescence in the region of ∼650 nm. However, we believe that in this region, the contribution of Si precipitates of various sizes and shapes is more important [16,17].…”
Section: Discussion Of the Resultsmentioning
confidence: 99%
“…Bands with maximum at 1.9 eV corresponded to intrinsic silica defect such as non-bridging oxygen hole centers. One of the valence bonds of oxygen of such a defect has an unpaired electron: ≡Si-O•, where "≡" denotes three bonds, "•" -an unpaired electron [15]. The band with a maximum at 2.6 eV was associated with another intrinsic silica defect -oxygen deficient centers: ≡Si-Si≡ [15].…”
Section: Mathematical Treatment and Discussionmentioning
confidence: 99%
“…This results in a shift of defect balance because of hydrogen passivation process. The implanted hydrogen can saturate oxygen dangling bond defects [4]. A prolonged irradiation leads to substantial changes of light generation and absorption in the visible wavelength range.…”
Section: Introductionmentioning
confidence: 99%