The thermal decomposition of ethylsilane (H 3 SiC 2 H 5 , EtSiH 3 ) is investigated behind reflected shock waves and the gas composition is analyzed by gas chromatography/mass spectrometry (GC/MS) and high-repetition-rate time-of-flight mass spectrometry (HRR-TOF-MS) in a temperature range of 990−1330 K and pressure range of 1−2.5 bar. The unimolecular decomposition of EtSiH 3 is considered to be initiated via a molecular elimination of H 2 (H 3 SiC 2 H 5 → H 2 + HSiC 2 H 5 ) followed by reactions of cyclic silicon-containing species. The main observed stable products were ethylene (C 2 H 4 ) and silane (SiH 4 ). Measurements are performed with a large excess of a silylene scavenger (C 2 H 2 ) to suppress bimolecular reactions caused by silylene (SiH 2 ) and to extract unimolecular rate constants. A kinetics mechanism accounting for the gas-phase chemistry of EtSiH 3 is developed, which consists of 24 Si-containing species, 31 reactions of Si-containing species, and a set of new thermochemical data. The derived unimolecular rate constant is represented by the Arrhenius expression k uni (T) = 1.96 × 10 12 s −1 exp(−205 kJ mol −1 /RT). The experimental data is reproduced very well by simulations based on the mechanism of this work and is in very good agreement with literature values. It is shown that EtSiH 3 is a promising precursor for the synthesis of SiC nanoparticles.