Membrane-Based NEMS/MEMS Biosensors

Abstract

Membrane-based nano/microelectromechanical system (NEMS/MEMS) biosensors offer sustainable, costeffective, ultraminiaturized and easy-to-use analytical techniques for various applications, especially in the environmental and biomedical/pharmaceutical fields. Compared to cantilever-based MEMS/NEMS biosensors, membrane-based MEMS/NEMS biosensors have higher sensitivity, especially for liquid samples, as the back of the membrane is not in contact with the analyte solution, resulting in a higher signal-to-noise ratio. This review provides deep insight into the fundamentals, membrane materials, different biosensing designs, as well as various transducers used in membrane-based MEMS/NEMS biosensors. The performance of the developed membrane-based MEMS/NEMS biosensors is critically discussed, and their trends and challenges are highlighted. Among the reported biosensors, capacitive-based surface stress biosensors and capacitive micromachined ultrasonic transducer (CMUT) biosensors are emerging as sophisticated and sensitive platforms for biosensing with the ability to detect multiple targets simultaneously. Nevertheless, challenges remain in biosensor design, parameter optimization, and selection of appropriate membrane materials. Further research is imperative to improve the capabilities of these biosensors, particularly in advancing array technologies for the simultaneous detection of multiple analytes.

Equivalent electrical circuits for electroacoustic MEMS design: a review

“…Outside of electroacoustic devices, lumped element models and electrical equivalent circuits have been used for the design of gyroscopes [129] comb-drive actuator [130], wake-up switch [97], accelerometers [131] and multiple other devices. Recent trends including bio-MEMS [132], membrane based NEMS and MEMS biosensors [133], microactuators for biomedical applications [134], biomechanical energy harvesting [135] and Micro-Opto-Electro-Mechanical Systems (MOEMS) [136] could also take advantages from the efficiency of lumped element modelling as a design tool.…”