MEMS accelerometer based system for motion analysis

Awasthi, Sonal; Joshi, Atul

doi:10.1109/ecs.2015.7125014

Cited by 6 publications

(3 citation statements)

References 4 publications

(4 reference statements)

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“…The mature CMOS technology and deep etching of silicon have brought numerous applications of MEMS in our daily life and industry. These products include mass sensor, pressure sensor, accelerometer, gyroscope, linear or rotatory displacement sensor, microphone, optical switch, micro mirrors and radio-frequency switch, to name a few [51][52][53][54][55]. By virtue of the outstanding physical properties such as the highest Young's modulus, the highest hardness, the highest thermal conductivity, erosion robustness, and the ultra-wide bandgap energy, diamond presents as a superior material for MEMS applications with high reliability and high performance superior to other semiconductors, such as low mechanical energy dissipation toward high-quality factor and high-sensitivity for MEMS sensors.…”

Section: Introductionmentioning

confidence: 99%

Progress in semiconductor diamond photodetectors and MEMS sensors

Liao

2021

Functional Diamond

167

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Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MeMs). the wide-bandgap energy of diamond offers the intrinsic advantage for solar-blind detection of DUV light. the recent progress in high-quality single-crystal diamond growth, doping, and devices design have led to the development of solar-blind DUV detectors satisfying the requirement of high Sensitivity, high Signal-to-Noise ratio, high spectral Selectivity, high Speed, and high Stability. On the other hand, the outstanding mechanical hardness, chemical inertness, and intrinsic low mechanical loss of diamond enable the development of MeMs sensors with boosted sensitivity and robustness. the micromachining technologies for diamond developed in these years have opened the avenue for the fabrication of high-quality single-crystal diamond mechanical resonators. in this review, we report on the recent progress in diamond DUV detectors and MeMs sensors, which includes the device principles, design, fabrication, micromachining of diamond, and devices physics. the potential applications of these sensors and a perspective are also described.

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Section: Introductionmentioning

confidence: 99%

Progress in semiconductor diamond photodetectors and MEMS sensors

Liao

2021

Functional Diamond

167

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“…AC response accelerometer and DC response accelerometer. AC response category can measure only dynamic events as AC coupled systems [13]. They are not suitable to measure static responses like gravity and centrifugal forces whereas DC response accelerometers can measure static as well as dynamic events for an object.…”

Section: A 3-axis Accelerometermentioning

confidence: 99%

Statistical Analysis of Accelerometer, Gyroscope with State Estimation

Kulkarni,

Bulet P

2019

IJEAT

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This paper describes the tracking of the object with the utility of a three-axis accelerometer and gyroscope for navigation. The sensor fusion is receiving enormous research interest which is used in monitoring and tracking position. For dynamic modeling, for real-time data, the perceptual mixing of the signals is required. For proper mixing of the signals, sensor fusion techniques are used. This paper presents the comparative review analysis for the three-axis accelerometer and gyroscope for linear acceleration and angular rotation.

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“…Fitband is used to calculate temperature & humidity sensor DHT11 to collect data of temperature and humidity [4]. It also consists of accelerometer is used to acquire the signals in three axes from the subject [5]. All these data is collected by user and analyzed.…”

Section: Introductionmentioning

confidence: 99%

Remotely Monitoring of Health using Fitband

Payal*,

Sushilkumar

2019

IJEAT

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This paper gives monitoring of health of user done remotely using fitband. It can done remotely with the help of bluetooth. The system takes the user data and analyze the data. The system also recommend the user if unusual activity is found out. With the help of DHT11 the system measures sweat and temperature of user’s body. With the help of accelerometer ADXL335 step count is counted. With the help of step count, distance travelled and calories burnt can be easily calculated. All these data is then transferred to application which is built in mobile terminal. Mobile terminal and fitband is connected through wirelessly using bluetooth.

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MEMS accelerometer based system for motion analysis

Cited by 6 publications

References 4 publications

Progress in semiconductor diamond photodetectors and MEMS sensors

Progress in semiconductor diamond photodetectors and MEMS sensors

Statistical Analysis of Accelerometer, Gyroscope with State Estimation

Remotely Monitoring of Health using Fitband

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