2019
DOI: 10.1109/tnb.2019.2905505
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MEMS-Actuated Carbon Fiber Microelectrode for Neural Recording

Abstract: Microwire and microelectrode arrays used for cortical neural recording typically consist of tens to hundreds of recording sites, but often only a fraction of these sites are in close enough proximity to firing neurons to record singleunit activity. Recent work has demonstrated precise, depthcontrollable mechanisms for the insertion of single neural recording electrodes, but these methods are mostly only capable of inserting electrodes which elicit adverse biological response. We present an electrostatic-based … Show more

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Cited by 15 publications
(4 citation statements)
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“…The actuation technique is a term given to the mechanism that transforms the input energy into a microstructure motion. There are different principles and approaches to actuate MEMS devices [7,[50][51][52][53][54][55], the most important of which include: electrostatic actuation [56][57][58][59][60][61][62][63][64], electrothermal actuation [4,44,[65][66][67][68], electromagnetic actuation [7,69], and piezoelectric actuation [48,70] (Fig. 2).…”
Section: Actuation Techniquesmentioning
confidence: 99%
“…The actuation technique is a term given to the mechanism that transforms the input energy into a microstructure motion. There are different principles and approaches to actuate MEMS devices [7,[50][51][52][53][54][55], the most important of which include: electrostatic actuation [56][57][58][59][60][61][62][63][64], electrothermal actuation [4,44,[65][66][67][68], electromagnetic actuation [7,69], and piezoelectric actuation [48,70] (Fig. 2).…”
Section: Actuation Techniquesmentioning
confidence: 99%
“…nonstimulating) conditions. To overcome the corrosion instability of metallic electrodes, a number of more electrochemically stable carbon-based materials have been proposed, including graphene [46][47][48][49], carbon nanotubes [50][51][52][53][54][55], conductive diamond [56][57][58][59][60], and carbon fibers [61][62][63][64]. For a comprehensive discussion on alternative electrode materials we direct the readers to other extensive reviews [65][66][67][68].…”
Section: Structural Failurementioning
confidence: 99%
“…Carbon arrays have become a viable option [ 40 ], [ 41 ], [ 42 ], [ 43 ], [ 44 ], [ 45 ] due to carbon’s inherent strength and conductivity. Carbon arrays have been implemented in a number of form factors.…”
Section: Introductionmentioning
confidence: 99%