MEMS-based thick film PZT vibrational energy harvester

Lei, Anders; Xu, Ruijuan; Thyssen, A.; Stoot, Adam Carsten; Christiansen, Thomas; Hansen, Karsten; Lou-Moller, R.; Thomsen, Erik Vilain; Birkelund, Karen

doi:10.1109/memsys.2011.5734377

Cited by 51 publications

(26 citation statements)

References 14 publications

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“…Different piezoelectric converters have been investigated based on different architectures [34][35][36][37][38][39][40][41][42][43][44][45]. In most cases, the converter employs a cantilever beam structure with different geometries for the piezoelectric layer such as rectangular and triangular.…”

Section: Overview Of Vibration Energy Convertersmentioning

confidence: 99%

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Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

et al. 2017

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Section: Overview Of Vibration Energy Convertersmentioning

confidence: 99%

“…They reach maximally only some micro watts at low frequencies. [26][27][28][29][30][31][32][33], piezoelectric [34][35][36][37][38][39][40][41][42][43][44][45] and magnetoelectric [46][47][48][49][50][51][52][53] vibration transducers prototypes.…”

Section: Overview Of Vibration Energy Convertersmentioning

confidence: 99%

Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

et al. 2017

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“…For integration of piezoelectric materials on silicon, various thin and thick film deposition techniques have been developed to date, including sputtered AlN [11][12], screen-printed PZT [13], sol-gel PZT [14][15][16], aerosol PZT [17], and others. However, in addition to their individual fabrication challenges, these deposited films are generally limited in their maximum allowable film thicknesses (2-5 µm), and show poor piezoelectricity compared to commercially available bulk ceramics.…”

Section: Piezoelectric Resonant Energy Harvestermentioning

confidence: 99%

Microsystems for energy harvesting

Najafi

Galchev

Aktakka

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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This paper reviews the state of the art in miniature microsystems for harvesting energy from external environmental vibration, and describes two specific microsystems developed at the University of Michigan. One of these microsystems allows broadband harvesting of mechanical energy from extremely low frequency (1-5 Hz) random vibrations abundant in civil infrastructure, such as bridges. These parametric frequency increased generators have a combined operating range covering two orders of magnitude in acceleration (0.54-19.6 m/s 2 ) and a frequency range spanning up to 60Hz, making them some of the most versatile harvesters in existence. The second of these systems is an integrated microsystem for harvesting energy from periodic vibrations at moderate frequencies (50-400 Hz) typically present in devices such as motors or transportation systems. This harvester utilizes a thinned-PZT structure to produce 2.74 µW at 0.1 g (167 Hz) and 205 µW at 1.5 g (154 Hz) at resonance. Challenges in the design of electronic circuitry (integrated or hybrid) for regulating the scavenged energy are briefly discussed.

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“…In addition, a hydrothermal method (24) and a screen printing process (25) have been developed for thick films over 5 μm in thickness. Lei et al (26) combined the thick-film screen printing technique and a micromachining process using a silicon on insulator (SOI) wafer to fabricate a microcantilever with a unimorph PZT thick film. The fabricated harvester device produces 14.0 μW with an optimal resistive load of 100 kΩ from 1g input acceleration at its resonant frequency of 235 Hz.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Thick Film Based on Bonding technologies for Energy Harvester

2017

Sensors and Materials

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With the development of low-power-consumption electronic devices and systems, the development of power supplies will be a major challenge. High-performance piezoelectric energy harvesters (PEHs) are an alternative that convert mechanical deformation into electric charge. For PEHs, it is highly desirable to utilize materials with a high piezoelectric charge coefficient. Piezoelectric thick films based on bonding and thinning technologies meet this requirement due to their high-temperature sintering process. In this paper we review the development of piezoelectric thick film fabrication processes, including the direct bonding process and the transferring process. Additionally, PEHs in substrates for different applications are described. Moreover, we summarize and compare the output performance of thick-film-based PEHs from all recently published papers in terms of normalized power density and resonant frequency.

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MEMS-based thick film PZT vibrational energy harvester

Cited by 51 publications

References 14 publications

Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

Survey of electromagnetic and magnetoelectric vibration energy harvesters for low frequency excitation

Microsystems for energy harvesting

Piezoelectric Thick Film Based on Bonding technologies for Energy Harvester

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