“…However, because of the complexity, large volume and high cost, the further application in some special area has been limited, such as in space and in ammunition [1,2]. RF MEMS phase shifters and switches, as the critical elements in PAAs, which have exhibited excellent characteristics including small volume, low insertion loss and low dc power consumption compared to the GaAs based MMIC counterparts, have been demonstrated in [3,4,5]. With the advent of RF MEMS phase shifters and switches, there should be considerable business interests in the development of MEMS-based phase array antenna.…”