MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Hedsten, Karin; Melin, Jonas; Bengtsson, Jörgen; Modh, P.; Karlén, David; Löfving, Björn; Nilsson, Richard; Rödjegård, Hendrik; Persson, Katarina; Enoksson, Peter; Nikolajeff, Fredrik; Andersson, G.

doi:10.1016/j.sna.2006.12.015

Cited by 21 publications

(15 citation statements)

References 11 publications

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“…More recently, K. Hedsten et al reported lateral deflections up to ∼10 µm with applied voltages of ∼70 V by assembly of an electrostatic silicon MEMS including a Fresnel lens fabricated by a hot embossing collective method (Figure 11(b)) [53].…”

Section: Towards Active Micro-optics On Vcselsmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.

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Section: Towards Active Micro-optics On Vcselsmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

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“…4(h) and 5(c)) [13,19]. To place the microlens on the scanner, a liquid ultraviolet-curable polymer droplet is formed and directly contacted onto the circular lens frame of a 300-µm diameter.…”

Section: Device Fabricationmentioning

confidence: 99%

“…Various strategies to adaptively compensate for the misalignment in free-space board-to-board optical interconnects have been demonstrated, including bulk optic Risley prisms [7,8], mechanical translational stages [9], liquid crystal spatial light modulators [10,11], and microelectromechanical systems (MEMS) devices [12,13]. Among these approaches, MEMS technology offers faster speed, low optical loss, and small form factor that can be directly integrated on top of VCSEL arrays [13].…”

mentioning

confidence: 99%

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Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Chou

Horsley

et al. 2009

Appl. Phys. A

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We present a free-space optical interconnect system capable of dynamic closed-loop optical alignment using a microlens scanner with a proportional integral and derivative controller. Electrostatic microlens scanners based on combdrive actuators are designed and characterized with vertical cavity surface emitting lasers (VCSELs) for adaptive optical beam tracking in the midst of mechanical vibration noise. The microlens scanners are fabricated on siliconon-insulator wafers with a bulk micromachining process using deep reactive ion etching. We demonstrate dynamic optical beam positioning with a 700 Hz bandwidth and a maximum noise reduction of approximately 40 dB. Eye diagrams with a 1 Gb/s modulation rate are presented to demonstrate the improved optical link in the presence of mechanical noise.PACS

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“…Fresnel zone plates (FZPs) are attractive as optical elements in these devices, comparing favorably to refractive lens structures due to their thin, planar shape without abandoning functionality. Microimaging systems, optical micro-electro-mechanical systems (MEMS), microsensors and photonic circuits are all possible applications that can benefit from using FZPs [1][2][3][4]. Three-dimensional (3D) volumetric phase FZPs provide flexibility for higher-order integration in novel concepts for micro devices.…”

mentioning

confidence: 99%

Multiple beam splitter using volumetric multiplexed Fresnel zone plates fabricated by ultrafast laser-writing

2012

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A simple approach to producing a 1×N beam splitter is demonstrated by fabricating a volumetric multiplex phase Fresnel zone plate in bulk transparent material. This comprised four layers of zone plates created in borosilicate glass by femtosecond laser direct-writing, each shifted laterally relative to the illumination axis, creating four separate beamlets. Since the power transmitted in each beamlet is proportional to the diffraction efficiency of the corresponding zone plate, the power ratios can be customized by adjusting the fabrication parameters of each layer. This approach demonstrates the potential of femtosecond laser direct-writing for the fabrication of complex optical elements in transparent media as components of integrated monolithic photonic devices.

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MEMS-based VCSEL beam steering using replicated polymer diffractive lens

Cited by 21 publications

References 11 publications

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

Multiple beam splitter using volumetric multiplexed Fresnel zone plates fabricated by ultrafast laser-writing

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