MEMS device for bending test: measurements of fatigue and creep of electroplated nickel

Larsen, Kim Lambertsen; Rasmussen, Annette; Ravnkilde, Jan Tue; Ginnerup, Morten; Hansen, Ole

doi:10.1016/s0924-4247(02)00306-0

Cited by 65 publications

(29 citation statements)

References 18 publications

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“…To date, the majority of NC metals used in experiments are produced by electrodeposition, of which Ni is a prime example [7,8,11,14,20,22,24,30,[58][59][60][61][62][63][64][65][66][67][68][69][70][71][72]. A Watts electrochemical bath [73] is often used in this process, in which current is passed between two electrodes submersed in an aqueous bath of metal salts [ Fig.…”

Section: Deposition Techniquesmentioning

confidence: 99%

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A Review of Fatigue Behavior in Nanocrystalline Metals

2009

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Nanocrystalline metals have been shown to exhibit unique mechanical behavior, including break-down in Hall-Petch behavior, suppression of dislocation-mediated plasticity, induction of grain boundary sliding, and induction of mechanical grain coarsening. Early research on the fatigue behavior of nanocrystalline metals shows evidence of improved fatigue resistance compared to traditional microcrystalline metals. In this review, experimental and modeling observations are used to evaluate aspects of cyclic plasticity, microstructural stability, crack initiation processes, and crack propagation processes. In cyclic plasticity studies to date, nanocrystalline metals have exhibited strongly rate-dependent cyclic hardening, suggesting the importance of diffusive deformation mechanisms such as grain-boundary sliding. The cyclic deformation processes have also been shown to cause substantial mechanicallyinduced grain coarsening reminiscent of coarsening observed during large-strain monotonic deformation of nanocrystalline metals. The crack-initiation process in nanocrystalline metals has been associated with both subsurface internal defects and surface extrusions, although it is unclear how these extrusions form when the grain size is below the scale necessary for persistent slip band formation. Finally, as expected, nanocrystalline metals have very little resistance to crack propagation due to limited plasticity and the lack of crack path tortuosity among other factors. Nevertheless, like bulk metallic glasses, nanocrystalline metals exhibit both ductile fatigue striations and metal-like Paris-law behavior. The review provides both a comprehensive critical survey of existing literature and a summary of key areas for further investigation.

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Section: Deposition Techniquesmentioning

confidence: 99%

“…A third technique utilizes an electrostatic actuator to generate bending in a MEMS cantilever structure [68]. Unlike the cantilever bending experiment used by Kraft et al, though, these samples were fabricated entirely from electroplated NC Ni and do not rely on a mismatch of mechanical properties.…”

Section: Thin Film Fatigue Experimentsmentioning

confidence: 99%

A Review of Fatigue Behavior in Nanocrystalline Metals

2009

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“…Therefore, a clear understanding of the mechanical behavior of thin film materials is of great importance in these applications. This understanding helps better analyze the creep in thermal actuators (Tuck et al, 2005;Paryab et al, 2006), to investigate the fatigue of polysilicon (Mulhstein et al, 2001;Shrotriya et al, 2004) and metallic micro-structures (Eberl et al, 2006;Larsen et al, 2003), to scrutinize the relaxation and creep behavior of switches made of aluminum (Park et al, 2006;Modlinski et al, 2004) and gold films (Gall et al, 2004), to study the hinge memory effect (creep) in micro-mirrors (Sontheimer, 2002), and to address the wear issues in micro-motors. (van Spengen, 2003) In some other applications, the thin film material is not necessarily performing a mechanical function.…”

Section: Introductionmentioning

confidence: 99%

Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

Tajik¹,

Jahed²

2012

Microelectromechanical Systems and Devices

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“…Also, their mechanical properties are not the same as those for bulk materials as mechanical properties at the micro-scale depend on the size and fabrication process. Thus, it is essential to perform mechanical tests in order to obtain relevant mechanical properties [2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film

Park¹,

H.Y.Bae

et al. 2011

Materialwissenschaft Werkst

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This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 lm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (chargecoupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 lm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 lm width were 72.8 € 3.7, 75.0 € 1.3, 73.3 € 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 lm width were 263.4 € 21.1, 238.6 € 4.5, 221.1 € 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 lm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.Keywords: Lead zirconate titanate thin film (PZT) / platinum (Pt) / micro tensile test / tensile strength / elastic modulus / thin film / Schlüsselwörter: dünne Blei-Zirkonat-Titanat (PZT) Schicht / Platin (Pt) / Mikrozugversuch / Zugfestigkeit / elastischer Modul / dünne Schicht /

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MEMS device for bending test: measurements of fatigue and creep of electroplated nickel

Cited by 65 publications

References 18 publications

A Review of Fatigue Behavior in Nanocrystalline Metals

A Review of Fatigue Behavior in Nanocrystalline Metals

Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film

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