MEMS for Nanopositioning: Design and Applications

Maroufi, Mohammad; Fowler, Anthony; Moheimani, S. O. Reza

doi:10.1109/jmems.2017.2687861

Cited by 44 publications

(16 citation statements)

References 204 publications

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“…We can see why by examining equation (10). The force on the comb-drive does not change with position.…”

Section: B Comb-drive Actuatormentioning

confidence: 99%

PWM as a Low Cost Method for the Analog Control of MEMS Devices

Pollock

Barrett²,

Corro³

et al. 2018

Preprint

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Abstract-In this paper we discuss the use of pulse width modulation (PWM) to control analog MEMS devices. We achieve precise linear analog control of MEMS by applying a PWM signal with a frequency well above the system's mechanical natural frequency. We first demonstrate this using a parallel plate actuator and comb-drive, then extend the technique to control a commerical deformable mirror. Such an approach allows the system designer to replace expensive drive electronics such as high precision DACs and high voltage, linear amplifiers with a simple on-off switch. Advancements in the electronics industry tend to make precise timing cheaper and faster; our approach exploits these long term trends to create low cost control circuits. We also show how PWM control can linearize the positional response of devices where typically the position would depend quadratically on the applied, analog voltage.

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“…We can see why by examining equation (10). The force on the comb-drive does not change with position.…”

Section: B Comb-drive Actuatormentioning

confidence: 99%

PWM as a Low Cost Method for the Analog Control of MEMS Devices

Pollock

Barrett²,

Corro³

et al. 2018

Preprint

View full text Add to dashboard Cite

show abstract

“…The analytic solutions use equation 8instead of equation (10) due to the aforementioned fringe field effects. We use an optical microscope to measure the comb-drive geometry and use these measurements in Comsol Multiphysics to simulate a value for dC/dx.…”

Section: B Comb-drive Actuatormentioning

confidence: 99%

“…We use an optical microscope to measure the comb-drive geometry and use these measurements in Comsol Multiphysics to simulate a value for dC/dx. This method accounts for both fringe field effects and the well known levitation effect [39]- [41], neither of which is captured by equation (10). It is worth noting that the analytic solutions shown in Fig.…”

Section: B Comb-drive Actuatormentioning

confidence: 99%

PWM as a Low Cost Method for the Analog Control of MEMS Devices

Pollock

Barrett

Corro

et al. 2019

J. Microelectromech. Syst.

View full text Add to dashboard Cite

In this paper we discuss the use of pulse width modulation (PWM) to control analog MEMS devices. We achieve precise linear analog control of MEMS by applying a PWM signal with a frequency well above the system's mechanical natural frequency. We first demonstrate this using a parallel plate actuator and comb-drive, then extend the technique to control a commerical deformable mirror. Such an approach allows the system designer to replace expensive drive electronics such as high precision DACs and high voltage, linear amplifiers with a simple on-off switch. Advancements in the electronics industry tend to make precise timing cheaper and faster; our approach exploits these long term trends to create low cost control circuits. We also show how PWM control can linearize the positional response of devices where typically the position would depend quadratically on the applied, analog voltage.

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“…The produced movement is fast and extremely accurate; as a result, the piezo-actuators are widely used in many nanopositioning applications [1,2]. Such applications involve microscopy, lithography, nanomanufacturing, and optics, all of which have been gaining popularity in the last few decades [3,4]. In order to stimulate the piezo-actuators, voltage is applied to the positioning stage using high-frequency waveforms.…”

Section: Introductionmentioning

confidence: 99%

High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers

Altaher

Aphale

2018

Computers

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This paper presents single-and dual-loop fuzzy control schemes to precisely control the piezo-driven nanopositioner in the x-and y-axis directions. Various issues are associated with this control problem, such as low stability margin due to the sharp resonant peak, nonlinear dynamics, parameter uncertainty, etc. As such, damping controllers are often utilised to damp the mechanical resonance of the nanopositioners. The Integral Resonant Controller (IRC) is used in this paper as a damping controller to damp the mechanical resonance. A further inherent problem is the hysteresis phenomenon (disturbance), which leads to degrading the positioning performance (accuracy) of the piezo-driven stage. The common approach to treat this disturbance is to invoke tracking controllers in a closed-loop feedback scheme in conjunction with the damping controllers. The traditional approach uses the Integral Controller (I) or Proportional Integral (PI) as a tracking controller, whereas this paper introduces the Proportional and Integral (PI)-like Fuzzy Logic Controller (FLC) as a tracking controller. The effectiveness of the proposed control schemes over conventional schemes is confirmed through comparative simulation studies, and results are presented. The stability boundaries of the proposed control schemes are determined in the same way as with a conventional controller. Robustness against variations in the resonant frequency of the proposed control schemes is verified.

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MEMS for Nanopositioning: Design and Applications

Cited by 44 publications

References 204 publications

PWM as a Low Cost Method for the Analog Control of MEMS Devices

PWM as a Low Cost Method for the Analog Control of MEMS Devices

PWM as a Low Cost Method for the Analog Control of MEMS Devices

High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers

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